Siargo FS1100 Manual de usuario

FS1100 User Manual

MEMS mass flow sensors

VA.0

Sold in North America by:

Servoﬂo Corporation

75 Allen Street

Lexington, MA 02472

www.servoﬂo.com/info@servoﬂo.com

781-862-9572

www.Siargo.com FS1100 User Manual

MEMS Mass Flow Sensors

With proprietary thermal-D® sensing technology

FS1100 Series

User Manual

Document No. 08-2022-FSTD-1 EN

Issue date: 2022.08

Revision: VA.0

Siargo Ltd.

3100 De La Cruz Boulevard, Suite 210

Santa Clara, California 95054

USA

Tel: +1(408)969.0368

Email: [email protected]om

Siargo Ltd. and its subsidiaries reserve the right to change the specifications and/or descriptions

without prior notice. Siargo and its subsidiaries shall not assume any inaccuracy or errors in this

manual. For further information and updates, please visit www.Siargo.com.

www.Siargo.com FS1100 User Manual

Attention !

Use with caution !

•Please carefully read this manual prior to operating this product.

•Do not open or modify any hardware which may lead to irrecoverable

damage.

•Do not use this product if you suspect any malfunctions or defection.

•Do not use this product for corrosive media or in a strong vibration

environment.

•Use this product according to the specified parameters.

•Only the trained or qualified personnel shall be allowed to perform

product services.

•Be cautious for electrical safety, and even it operates at a low voltage,

any electrical shock might lead to some unexpected damages.

•The gas to be measured should be clean and free of particles, as

even light particles may be accumulated inside the tiny pressure port

that may result in inaccuracy in metrology, clogging, or other

irrecoverable damage.

•Do not apply for any unknown or non-specified gases that may

damage the product.

 
 
4
www.Siargo.com FS1100 User Manual 
Table of Contents 
 
Overview.................................................................................................. 6 
Receipt / unpack of the products ................................................................ 7 
Knowing the products ............................................................................... 8 
1 Product description .................................................................................................8 
2 Power and data pinout description ...........................................................................8 
3 Mechanical dimensions............................................................................................9 
Wetted materials and compatibility ..........................................................10 
Operation................................................................................................11 
1 Check the product specifications ............................................................................ 11 
2 Check the leakage ................................................................................................. 11 
3 Power the product and digital data connection ....................................................... 11 
4 I2C communication protocol ................................................................................... 12 
4.1 I2C interface connection diagram..................................................................................12 
4.2 I2C interface read/write sequences ................................................................................12 
4.3 I2C interface command description ...............................................................................13 
4.4 CRC checksum calculation ........................................................................................... 13 
Installation..............................................................................................14 
Product selection.....................................................................................16 
Product performance ...............................................................................17 
1 Technical specifications ......................................................................................... 17 
2 Analog output of flow rate .....................................................................................18 
3 Analog output of temperature ...............................................................................19 
4 Pressure loss .........................................................................................................19 
Technical notes for the product performance.............................................20 
1 Measurement principles......................................................................................... 20 
2 Precautions for the best performance of the product ............................................... 20 
2.1 Altitude changes.........................................................................................................20 
2.2 Excessive humidity or condensation .............................................................................20 

www.Siargo.com FS1100 User Manual

9.2.3 Metrology verification .................................................................................................21

9.2.4 Cleaning and sterilization ............................................................................................21

10. Warranty and Liability..............................................................................22

11. Service/order contact and other information..............................................24

Appendix I: Sensor evaluation kit ...................................................................25

Appendix II: Document history.......................................................................25

www.Siargo.com FS1100 User Manual

1. Overview

All contact information can be found at the end of this manual.

This manual provides essential information for the FS1100 series of mass flow sensors that are

designed primarily for medical applications such as ventilators, a fast response time, and low-

pressure loss. The sensor can also be used for other gas flow measurements and different threaded

connectors can be made available via an adaptor. The product performance, maintenance, and

troubleshooting, as well as the information for product order, technical support, and repair, are also

included.

The sensing elements are manufactured with Siargo’s proprietary MEMS (micro-electro-mechanical

systems) thermal mass flow sensing technologies (

Thermal-D

®) that measures the calorimetry and

diffusivity of the flow medium. This technology compared to conventional calorimetric sensing

offers much better linearity in the full dynamic range, removes gas sensitivities for gases that have

similar thermal diffusivities, and increases the measurement accuracy when used with a gas

conversion factor. It also simultaneously outputs the instant flow medium temperature data and

improves the temperature performance of the thermal sensing approach.

The FS1100 sensors measures primarily the mass flow rate measurements of a full scale up to 250

SLPM with a dynamic range of 100:1, and the temperature measurement of -20 to 85 °C. It has a

maximum pressure rating of 2 bar (30 psi).

The sensor can be sterilized via a medical cleanse agent that is compatible with the wetted materials

of polycarbonate, silicon nitride, and medical-grade epoxy LOCTITE 84-3J. Some alcohol may react

with polycarbonate and is not recommended for use. An alternative standard dry EtO sterilization

process would be highly recommended.

Thermal-D

®is a trademark of Siargo’s thermal sensing technology.

www.Siargo.com FS1100 User Manual

2. Receipt / unpack of the products

Upon receipt of the products, please check the packing box before the dismantlement of the packing

materials. Ensure no damages during shipping. If any abnormality is observed, please contact and

notify the carrier who shipped the product and inform the distributors or sales representatives if the

order is not placed directly with the manufacturer; otherwise, the manufacturer should be informed.

For any further actions, please refer to the return and repair section in this manual.

If the packing box is intact, proceed to open the packing box, and you shall find the product (either

the sensor formality per the actual order) as shown below.

Please check immediately for the integrity of the product. If any abnormality is identified, please

notify the distributor/sales representative or manufacturer as soon as you can. If any defects are

confirmed, an exchange shall be arranged immediately via the original sales channel. This user

manual shall also be included in the packing box or via an online link for an electronic version which

should be sent by your sales agent. In most cases, this manual shall be made available to the

customer before the actual order.

Please note that the data and power cable socket is a standard Molex 87831-1041 (THT). According to

the application requirements for cable length and connectors, the user can obtain the corresponding cable

from Molex’s webpage:

https://www.molex.com

Figure 2.1: FS1100

www.Siargo.com FS1100 User Manual

3. Knowing the products

3.1 Product description

Figure 3.1: FS1100 product description

3.2 Power and data pinout description

Table 3.1: FS1100 pin assignment.

Figure 3.2: FS1100 pinout

Connector: Molex 87831-1041 (THT), the user can

obtain the cable from www.molex.com according

to the application requirements.

Note: The product requires a power supply of 5 (±5%) Vdc. This voltage is internally filtered and regulated.

However, the analog output might be influenced if the supply voltage would have large deviations.

It is advised that the power should be off when plugging in or out the cable to avoid any damage.

DEFINITION

Fout, analog output, flow data

2, 4, 9

GND, ground

Tout, analog output, temperature

SCL, I2C clock

SDA, I2C data

7, 10

N.C.

VCC, power supply 5 (±5%) Vdc

Sensor house

O-ring Φ16 X 1.8

(Nitrile rubber)

Inlet and outlet

Power & data

Cable socket

Flow direction

Stand

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3.3 Mechanical dimensions

Figure 3.3: FS1100 mechanical dimensions.

www.Siargo.com FS1100 User Manual

4. Wetted materials and compatibility

The product body is made of medical compatible plastics (polycarbonate). The sensing element

comprises silicon, silicon nitride, and silicon dioxide. The sensor chip surfaces are passivated with

silicon nitride and silicon dioxide. The electronic sealing is provided by LOCTITE Ablestik 84-3J.

Another wetted material that may be exposed is FR-4.

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