Siargo FS1015CL Series Manual de usuario

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FS1015CL User Manual

MEMSmassflowsensors

VB.2

Sold in North America by:

Servoﬂo Corporation

75 Allen Street

Lexington, MA 02472

www.servoﬂo.com/info@servoﬂo.com

781-862-9572

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MEMS Mass Flow Sensors

withthermalcalorimetricsensingtechnology

FS1015CLSeries

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User Manual

DocumentNo. 03‐2022‐FS8EN

Issuedate:  2022.03

Revision:  VB.2

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SiargoLtd.

3100DeLaCruzBoulevard,Suite210

SantaClara,California95054

USA

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Tel:+1(408)969.0368

Email:[email protected]

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©Copyright2022andLiabilityDisclaimer

SiargoLtd.anditssubsidiariesreservetherighttochangethespecificationsand/ordescriptions

withoutpriornotice.Siargoanditssubsidiariesshallnotassumeanyinaccuracyorerrorsinthis

manual.Forfurtherinformationandupdates,pleasevisitwww.Siargo.com.

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Attention!

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Usewithcaution!

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Pleasecarefullyreadthismanualpriortooperatingthisproduct.

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Donotopenormodifyanyhardwarewhichmayleadtoirrecoverable

damage.

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Donotusethisproductifyoususpectanymalfunctionsordefection.

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Donotusethisproductforcorrosivemediaorinastrongvibration

environment.

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Usethisproductaccordingtothespecifiedparameters.

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Onlythetrainedorqualifiedpersonnelshallbeallowedtoperform

productservices.

Becautiousforelectricalsafety,andevenitoperatesatalowvoltage,

anyelectricalshockmightleadtosomeunexpecteddamages.

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Thegastobemeasuredshouldbecleanandfreeofparticles,as

evenlightparticlesmaybeaccumulatedinsidethetinypressureport

thatmayresultininaccuracyinmetrology,clogging,orother

irrecoverabledamage.

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Donotapplyforanyunknownornon‐specifiedgasesthatmay

damagetheproduct.

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TableofContents

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1.Overview..................................................................................................5

2.Receipt/unpackoftheproducts................................................................6

3.Knowingtheproducts...............................................................................7

3.1Productdescription...............................................................................................7

3.2Poweranddatapinoutdescription.........................................................................7

3.3Mechanicaldimensions..........................................................................................8

4.Wettedmaterialsandcompatibility...........................................................9

5.Installation...............................................................................................9

6.Productselectionandorderinformation....................................................10

6.1Productselection................................................................................................10

6.2Ordercontactandcustomersupport.....................................................................10

7.Productperformance...............................................................................11

7.1Technicalspecifications.......................................................................................11

7.2Analogoutput.....................................................................................................12

7.3PressurelosswithISO15mmconnector................................................................12

8.Technicalnotesfortheproductperformance.............................................13

8.1Measurementprinciples.......................................................................................13

8.2Precautionsforthebestperformanceoftheproduct..............................................13

8.2.1Altitudechanges...........................................................................................................13

8.2.2Excessivehumidityorcondensation..............................................................................13

8.2.3Metrologyverification...................................................................................................14

8.2.4Cleaningandsterilization..............................................................................................14

9.WarrantyandLiability..............................................................................15

10.Servicecontactandinformation...............................................................17

Appendix:Documenthistory........................................................................18

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1. Overview

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Allcontactinformationcanbefoundattheendofthismanual.

ThismanualprovidesessentialinformationfortheFS1015CLseriesofmassflowsensorsthatare

designedprimarilyformedicalapplicationssuchasventilators,anesthesiaequipment,and

endoscopewiththeISO15mmadapterswithafastresponsetimeandaverylow‐pressureloss.The

sensorcanalsobeusedforothergasflowmeasurementsanddifferentthreadedconnectorscanbe

madeavailableviaanadaptor.Theproductperformance,maintenance,andtroubleshooting,aswell

astheinformationforproductorder,technicalsupport,andrepair,arealsoincluded.

TheFS1015CLsensorsaremanufacturedwiththecompany’sproprietaryMEMS(micro‐electro‐

mechanicalsystems)sensingandpackagetechnologythatoffersprimarilythemassflowrate

measurementsofafullscaleupto150SLPMwithadynamicrangeof100:1,andthemaximum

pressureratingof2bar(30psi).

Thesensorcanbesterilizedviaamedicalcleanseagentthatiscompatiblewiththewettedmaterials

ofpolycarbonate,siliconnitride,andmedical‐gradeepoxyLOCTITE84‐3J.Somealcoholmayreact

withpolycarbonateandisnotrecommendedforuse.AnalternativestandarddryEtOsterilization

processwouldbehighlyrecommended.

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2. Receipt/unpackoftheproducts

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Uponreceiptoftheproducts,pleasecheckthepackingboxbeforethedismantlementofthepacking

materials.Ensurenodamagesduringshipping.Ifanyabnormalityisobserved,pleasecontactand

notifythecarrierwhoshippedtheproductandinformthedistributorsorsalesrepresentativesifthe

orderisnotplaceddirectlywiththemanufacturer;otherwise,themanufacturershouldbeinformed.

Foranyfurtheractions,pleaserefertothereturnandrepairsectioninthismanual.

Ifthepackingboxisintact,proceedtoopenthepackingbox,andyoushallfindtheproduct(either

thesensorformalitypertheactualorder),togetherwiththepoweranddatacableiftheorderis

includedasshownbelow.

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Pleasecheckimmediatelyfortheintegrityoftheproductandthepoweranddatacable;ifany

abnormalityisidentified,pleasenotifythedistributor/salesrepresentativeormanufacturerassoon

asyoucan.Ifanydefectsareconfirmed,anexchangeshallbearrangedimmediatelyviatheoriginal

saleschannel.Thisusermanualshallalsobeincludedinthepackingboxorviaanonlinelinkforan

electronicversionwhichshouldbesentbyyoursalesagent.Inmostcases,thismanualshallbemade

availabletothecustomerbeforetheactualorder.

Pleasenotethatoneendofthedatacableistobepluggedintothesensorandanotherendiscolored

wireterminals.PleasereadSec.3carefullybeforeconnectingtothepowerandyourdataterminals.

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Figure2.1:FS1015CLFigure2.2:Optionalpoweranddata

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www.Siargo.comFS1015CLUserManual

3. Knowingtheproducts

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3.1 Productdescription

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

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Note:ThestandardproductscomewithISO‐15mmconnectors.Forothertypesofconnectors,a

metaladaptercanbeaddeduponrequest.

Figure3.1:FS1015CLpartsdescription

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3.2 Poweranddatapinoutdescription



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Table3.1:FS1015CLpinassignment.



 

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

Figure3.2:FS1015CLpinoutandcable

Connector:AMPMODUMTE5position;cablelength:50cm.

Note:Theproductrequiresapowersupplyof5±5%Vdc.Thisvoltageisinternallyfilteredandregulated.

However,theanalogoutputmightbeinfluencedifthesupplyvoltagewouldhavelargedeviations.

Itisadvisedthatthepowershouldbeoffwhenplugginginoroutthecabletoavoidanydamages.

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COLOR

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DEFINITION

1BlueSDA,I

Cdata

2GreenAnalogoutput,0.5~4.5Vdc

3RedVCC,power8~24Vdc

4BlackGND,ground

5YellowSCL,I

Cclock

Installationholes

ISO15mm,maleinlet

Power&data

Cablesocket

ISO15mm,

femaleoutlet





½”MNPT.

Othersbyrequests





8

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3.3 Mechanicaldimensions



Figure3.3:FS1015CLmechanicaldimensionswithISO15mmconnectors.





Figure3.4:FS1015CLmechanicaldimensionswith½”NPTconnectors.

Note:Othertypesofconnectorscouldbepossibleuponrequest.



9

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4. Wettedmaterialsandcompatibility



Theproductbodyismadeofmedicalcompatibleplastics(polycarbonate).Thesensingelement

comprisessilicon,siliconnitride,andsilicondioxide.Thesensorchipsurfacesarepassivatedwith

siliconnitrideandsilicondioxide.TheelectronicsealingisprovidedbyLOCTITEAblestik84‐3J.

AnotherwettedmaterialthatmaybeexposedisFR‐4.



5. Installation



Theproductatthetimeofshipmentisfullyinspectedforproductqualityandmeetsallsafety

requirements.Additionalsafetymeasuresduringhandlingandinstallationshouldbeapplied.To

preventESD(electrostaticdischarge)damageand/ordegradation,takecustomaryandstatutory

ESDprecautionswhenhandling.Donotopenoralteranypartoftheproduct,whichwouldleadto

malfunctionandirrecoverabledamage.

Fortheinstallation,theproductcomeswithstandardISO15mmconnectors,wherethegasinletis

themaleandtheoutletisthefemaleconnector.Thedataandpowercableisnormallyshippedwith

theproduct,otherwise,itcanbeobtainedfromthemanufacturer.Oneendofthecablecanbe

directlypluggedintothesensorsocketwhileanotherendisthecoloredwireterminalswhichneed

tobeconnectedcorrespondinglytothepowersupplyanddatareceivingterminals.Makesureto

refertoSec3.2anddouble‐checktheconnectionbeforepoweron.Beforesupplyingthegastothe

sensor,makesuretothemechanicalleakageproofoftheconnectionsandallelectricalprecautions

areapplied.Itshouldbenotedthatthesensorisdesignedformediumtolowpressureperthe

applications,therefore,thesystemdesignwouldbeimportantfortheflowstabilityandrelatedflow

noises.

Itisadvisedthattheproductsarebestusedfornon‐explosiveandnon‐corrosivecleangases.The

sensorscannotbeusedforgasmetrologyoffluorideorfluoride‐containinggases.Theuseofthese

gasesmaycausetheproducttomalfunctionorevenseveredamages.

Don'texposetheproduct'selectronicsotherthantheinnerflowchanneltoanyliquids,theunitdoes

nothavewaterproofelectronics.Don'tflowgasinconditionsthatcancausecondensingwatervapor

tobetrappedinsidetheunitduringoperationastheaccuracycouldbesignificantlyinfluenced.

Itissuggestedtodesignyourapplicationsothatthenominalflowrateisapproximately70%ofthe

full‐scaleflowratingofthesensor.Don'tuseasensorwithaflowrangeinextremecases,forinstance,

don'tusea150SLPMsensorfora1.5SLPMapplication.



10

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6. Productselectionandorderinformation

6.1 Productselection



Theproductpartnumberiscomposedoftheproductmodelnumberandsuffixes,indicatingeach

oftheselectableparameters.Refertothefollowingfordetails.



FS1015CL‐‐‐



Note:ForCO2,themaximumflowrateis100SLPM.



6.2 Ordercontactandcustomersupport



Thesalesofficesandthesalesdistributors/representativesarelistedattheendofthisdocument.For

smallquantities,theordercanbeplacedeitherthroughtheSiargowebsite:www.siargo.comorthe

salesoffice.Forlargequantities,pleasecontactthesalesoffice,distributors,orsalesrepresentatives.

Siargoismakingeveryefforttoensurethequalityoftheproducts.Incaseofquestionsand/or

productsupports,pleasecontactthecustomerservicelistedattheendofthedocument.

Gas:A–air;C–CO2;N–N2;O–O2;R–Ar;forothergases,

pleasecontactthemanufacturer.

Mechanicalconnector:ISO–ISO15mm;N–½”MNPT

Fullscaleflowrate:100or150;defaultunitisSLPM.Forother

ranges,pleasecontactthemanufacturer.

Este manual sirve para los siguientes modelos

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