Shimadzu IMLayer Manual de usuario

ZEBV-5088C

Matrix Vapor Deposition System

iMLayer

Pre-Installation Requirements

（InstallationPreparations/Confirmation）

ZEBV-5088C

Notice

(1) All rights are reserved, including those to reproduce this manual or parts thereof in any form without

permission in writing from Shimadzu Corporation.

(2) Information in this manual is subject to change without notice and does not represent a commitment on

the part of the vendor.

(3) Any errors or omissions which may have occurred in this manual despite the utmost care taken in its

production will be corrected as soon as possible, although not necessarily immediately after detection.

ZEBV-5088C

Contents

1. INTRODUCTION ·····················································3

2. INSTALLATION CONDITIONS ···································4

2.1Carry-in route ..............................................................................4

2.2Exampleinstallation ...................................................................5

2.3Wiring andPiping .......................................................................7

2.4AmbientRequirements ..............................................................7

2.5RequiredPowerSupply .............................................................8

3. Customer pre-check list ....................................................10

ZEBV-5088C

1. Introduction

These Pre-Installation Requirements describe the requirement to facilitate installation of the iMLayer. To

keep the instrument stable, please make prior arrangement in accordance with these requirements. They

can also be used for routine maintenance. This instrument consists of a main unit used for vapor

deposition of the matrix, a deposition power supply used to supply power to the boat for vapor deposit, and

a vacuum pump used to evacuate the inside the chamber of iMLayer.

ZEBV-5088C

2. Installation Conditions

Be sure to read the installation precautions described below to keep the instrument stable. Also, follow the

precautions given in the Safety Precautions of the instruction manual that came with the instrument.

2.1 Carrying-in

The instrument can be carried on a hand truck. Check the following points so that delivery can be carried

out without problems.

1) Check that there is no step the passage.

2) When lifting the iMLayer, be sure to wear non-slip gloves and to work by more than two persons.

ZEBV-5088C

2.2 Example Installation (dimensions indicated in mm)

Frontview

Topview

Fig.1Typical LayoutUsing aTypical Draft chamber.

650（開口）

610

230

510

（980）

416

150

壁

430

(1000)

150 296

150

450

305

390

660（庫内有効奥行）

382

100

650(opening)

Wall

660(inside depthof thefumehood)

ZEBV-5088C

Teble.1DimensionsandWeight

Item

Item name

Dimensions(mm)

Weight(kg)

number

Width

Depth

Height

MainiMLayerunit

416

450

610

DepositionPowersupply(EVC)

296

390

230

Rotarypump

163

431

230

Draftchamber（typical）*

Table(forreference)

300

500

750

‐

*The opening needs to be 650mm or more.

Projection is not included in the dimensions.

In the example installation given in Fig. 1, iMLayer is installed on the existing draft chamber, and

the deposition power supply and the rotary pump are placed on the table which has been prepared

separately. The specifications required for the table is as follows.

Width : 500mm or more

Depth : 300mm or more

Height : 750mm or more

Load limit : 40kg or more (Each step)

Distance between iMLayer and deposition power supply must be within approx. 2.8 m.

Distance between iMLayer and rotary pump must be within approx. 2 m.

The specifications required for the draft chamber is as follows. See also Fig 1 Example Installation.

Inside depth of the draft chamber : 660mm or more

Inside width of the draft chamber : 1000mm ore more

Height of opening (front glass) : 650mm ore more

Load limit (Inside floor) : 100kg ore more

Minimum local exhaust air velocity : 1m/s ore more

A certain amount of space is required around the iMLayer for installation and maintenance. The

space required is as follows. See also Fig 1 Example Installation.

Space behind the iMlayer : 150mm or more

Space to right of the iMlayer : 430mm or more

Space to left of the iMlayer : 150mm or more

Space in front of the iMLayer : 305mm or more

Space behind the deposition power supply : 100mm or more

Space to right and left of the deposition power supply : 100mm or more

Place rotary pump on a firm floor surface or on a low working surface at a distance where it can be

connected to the iMLayer by attached piping. (Extending piping to a distance greater than this will

prevent assurance of unit performance.) The rotary pump will be placed on the side of or under the

draft chamber on which iMLayer is installed. When placing the rotary pump on the side of the draft

chamber, for wiring and piping, ensure a distance of 150 mm or more between the side of the rotary

pump and the side of the draft chamber.

ZEBV-5088C

2.3 Wiring and Piping

Connection of power supply, cables, etc. of the iMLayer, is shown in Fig 2.

Fig2iMLayercableconnection

Table2cableconnectioninformation

Item

number

Description

Length(m)

Powersupplycable(Tothedepositionpowersupply)

2.8

Interfacecable

2.8

RS-422/485cable

2.8

Depositionboattemperaturesignalcable

2.8

HeatercableNo1(Red)

2.8

HeatercableNo1(Blue)

2.8

ACcable

2.5

RP powersupplycable

2.0

RPevacuationhose

RPsuctionhose

2.4 Ambient Requirements

To ensure safe use of the product, sufficient consideration must be given to preparing its installation

environment

Temperature : 18 to 28°C

Humidity : 40 to 70% (with no condensation)

Draft chamber : Prepare a draft chamber or equivalent exhaust equipment in the room the

instrument is installed. Failure to do so may cause dispersion of the matrix when

opening the equipment to the air after vapor deposition. Also wear safety gear

during the process.

To power supply

To evacuation duct

ZEBV-5088C

Safety gear Some matrices used contain toxic materials. Wear safety glasses, face shield,

protective gloves, mask and protective clothing such as a white coat during the

process. Use a Dustproof / Gasproof mask to prevent inhaling the matrix dust.

Exhaust Be sure to discharge the evacuation gases from the rotary pump into a duct system

such as a draft chamber.

Other Be sure to read “Safety Instructions” of the instruction manual before using this

instrument.

2.5 Required Power Supply

For safety reasons use a power supply equipped with a ground fault interrupter.

The iMLayer uses 100 VAC, 15A, 50/60 Hz (single phase). Avoid sharing power source with other

equipment.

To avoid electric shock, ensure grounding at power supply ground terminal has a resistance of 100 ohm

or less.

To assure performance, keep voltage fluctuation within ±10% and frequency stability within ±1 Hz.

In the country where power supply voltage is not AC100V, use a step-down transformer on the AC100V

power-supply line. Refer Fig.4 to install the step-down transformer.

Ifpowersuppliesoftheabovespecificationsarenotavailable,alterationstoroompowersupplycapacity

willbenecessary.

<Step-downtransformer>

Partnumber

Description

Remarks

225-25315-41

STEP-DOWNTRANSFORMER1.5KVA

The Step- down transformer and

cablesareincluded.

(Pleaseprepareaplug.)

*Thenumber 225-25315 -41 referstotheShimadzuCorporationpartnumber

Fig 3Configurationof AC100Vpower supplycable terminal

ZEBV-5088C

Fig 4Howtoinstallthestep-downtransformer,TBX-1.5KVA

OUT IN

Blue(N)

240V

230V

220V

200V

100V

Brown(L)

Yellow/Green(E)

Blue(N)

Brown(L)

Black

Earth Terminal

(Inside)

To iMScope AC100V in

To power supply

Earth Terminal

(Outside)

225-25316

STEP-DOWN TRNASFORMER 1.5K

225-25317-41

CABLE ASSY, IMSCOPE PS1

225-25319-41

CABLE ASSY, IMSCOPE PS3

225-25318-41

CABLE ASSY, IMSCOPE PS2

225-25320-41

CABLE ASSY, IMSCOPE EARTH To protective earth

Connects to either 240V, 230,V 220V, or 200V

terminal according to power supply voltage

iMLayer

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