Pfeiffer HIPACE 30 Manual de usuario

OPERATING INSTRUCTIONS

Translation of the Original

HIPACE 30

Turbopump

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to

support you by its performance, its perfect operation and without interfering your individual

application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a

comprehensive and complete range of top-quality products and first-class service. With this

expertise, we have acquired a multitude of skills contributing to an efficient and secure

implementation of our product.

Knowing that our product must not interfere with your actual work, we are convinced that our

product offers you the solution that supports you in the effective and trouble-free execution of

your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

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Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Applicable documents 7

1.1.2 Product variants 7

1.2 Target group 7

1.3 Conventions 7

1.3.1 Instructions in the text 7

1.3.2 Pictographs 8

1.3.3 Stickers on the product 8

1.3.4 Abbreviations 9

1.4 Trademark proof 9

2 Safety 10

2.1 General safety instructions 10

2.2 Safety instructions 10

2.3 Safety precautions 14

2.4 Limits of use of the product 14

2.5 Proper use 15

2.6 Foreseeable improper use 15

2.7 Personnel qualification 15

2.7.1 Ensuring personnel qualification 16

2.7.2 Personnel qualification for maintenance and repair 16

2.7.3 Advanced training with Pfeiffer Vacuum 16

3 Product description 17

3.1 Function 17

3.1.1 Cooling 17

3.1.2 Rotor bearing 17

3.1.3 Drive 17

3.2 Scope of delivery 17

3.3 Identifying the product 18

3.3.1 Product types 18

3.3.2 Product features 18

4 Transportation and Storage 19

4.1 Transport 19

4.2 Storage 19

5 Installation 20

5.1 Preparatory work 20

5.2 Connecting the high vacuum side 20

5.2.1 Requirements for the dimensioning of a counter flange 20

5.2.2 Consider earthquake protection 21

5.2.3 Using a splinter shield or protective screen 22

5.2.4 Using the vibration compensator 22

5.2.5 Mounting orientations 23

5.2.6 Installation of ISO-KF flange 23

5.2.7 Attaching ISO-K flange onto ISO-K 24

5.2.8 Installation of ISO-K flange onto ISO-F 24

5.2.9 Attaching CF flange to CF-F 25

5.3 Connecting the fore-vacuum side 27

5.4 Connecting accessories 28

5.5 Connecting the electrical supply 29

5.5.1 Ground turbopump 29

5.5.2 Establishing the electric connection 29

6 Operation 31

Table of contents

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6.1 Commissioning 31

6.2 Operating modes 32

6.2.1 Operation without operating unit 32

6.2.2 Operation via connection "E74" 32

6.2.3 Operation via multi-function connection "X3" 32

6.2.4 Operation via Pfeiffer Vacuum display and control unit 32

6.2.5 Operation via field bus 32

6.3 Switching on the turbopump 33

6.4 Operation monitoring 33

6.4.1 Operating mode display via LED 33

6.4.2 Temperature monitoring 34

6.5 Switching off and venting 34

6.5.1 Switching off 34

6.5.2 Venting 34

7 Maintenance 36

7.1 General maintenance information 36

7.2 Maintenance intervals and responsibilities 36

7.3 Replacing the operating fluid reservoir 37

7.3.1 Removing the operating fluid reservoir 37

7.3.2 Install operating fluid reservoir 38

7.4 Replace the electronic drive unit 39

7.4.1 Removing electronic drive unit 40

7.4.2 Install the electronic drive unit 40

7.5 Confirming the rotation speed specification 41

8 Decommissioning 42

8.1 Shutting down for longer periods 42

8.2 Recommissioning 42

8.3 Disposing of the vacuum pump 43

9 Malfunctions 44

10 Service solutions from Pfeiffer Vacuum 46

11 Spare parts HiPace 30 48

12 Accessories 49

12.1 Accessory information 49

12.2 Ordering accessories 49

13 Technical data and dimensions 51

13.1 General 51

13.2 Technical data 51

13.3 Dimensions 53

Declaration of conformity 54

Table of contents

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List of tables

Tbl. 1: Abbreviations used in this document 9

Tbl. 2: Permissible ambient conditions 15

Tbl. 3: Product designation of Pfeiffer Vacuum HiPace turbopumps 18

Tbl. 4: Turbopump features 18

Tbl. 5: Requirements for the dimensioning of customer-specific high vacuum con-

nection

Tbl. 6: Effect of splinter shield or protective screen on pumping speed 22

Tbl. 7: Factory setting of the electronic drive unit for turbopumps when delivered 31

Tbl. 8: Behavior and meaning of the LEDs on the electronic drive unit 34

Tbl. 9: Factory settings for delayed venting in turbopumps 35

Tbl. 10: Characteristic nominal rotation speeds of the turbopumps 41

Tbl. 11: Troubleshooting turbopumps 45

Tbl. 12: Overview of the spare parts available for the HiPace 30 48

Tbl. 13: HiPace 30 accessories 50

Tbl. 14: Conversion table: Pressure units 51

Tbl. 15: Conversion table: Units for gas throughput 51

Tbl. 16: Technical data for HiPace 30 | 24 V 53

List of tables

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List of figures

Fig. 1: Position of the labels on the product 8

Fig. 2: HiPace 30 design 17

Fig. 3: Example: Safety connections 22

Fig. 4: Recommended alignment when using oil-sealed backing pumps 23

Fig. 5: Flange connection ISO-KF to ISO-KF 23

Fig. 6: Flange connection ISO-K to ISO-F, bracket screws 24

Fig. 7: Flange connection CF-F, hexagon head screw and through hole 26

Fig. 8: Flange connection CF-F, stud screw and tapped hole 26

Fig. 9: Flange connection CF-F, stud screw and through hole 27

Fig. 10: Example of fore-vacuum connection on HiPace 30 27

Fig. 11: Example of accessory connection via adapter TCS 12 28

Fig. 12: Example: Connecting the grounding cable 29

Fig. 13: Connecting the electronic drive unit to a power supply pack 30

Fig. 14: Removing the operating fluid reservoir 38

Fig. 15: Insert capillary rods and install operating fluid reservoir 39

Fig. 16: Removal of electronic drive unit 40

Fig. 17: Assembling the electronic drive unit 41

Fig. 18: Spare parts HiPace 30 48

Fig. 19: Dimensions HiPace 30 | DN 63 ISO-K 53

Fig. 20: Dimensions HiPace 30 | DN 63 CF-F 53

Fig. 21: Dimensions HiPace 30 | DN 40 ISO-KF 53

List of figures

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

These operating instructions are for customers of Pfeiffer Vacuum. They describe the function of the

designated product and provide the most important information for safe usage of the product. The de-

scriptions comply with applicable directives. All information provided in these operating instructions refer

to the current development status of the product. The documentation remains valid as long as the cus-

tomer does not modify the product in any way.

1.1.1 Applicable documents

Document Number

Operating instructions, “electronic drive unit" TC 110 standard PT 0204 BN

Operating instructions for "electronic drive unit" TC 110 PB PT 0245 BN

Operating instructions, electronic drive unit TC 110 E74 PT 0301 BN

Operating instructions for "electronic drive unit" TC 110 RS PT 0351 BN

Declaration of conformity Part of this document

You can find these documents in the Pfeiffer Vacuum Download Center.

1.1.2 Product variants

●HiPace 30, DN 63 ISO-K, TC 110

●HiPace 30, DN 63 CF-F, TC 110

●HiPace 30, DN 40 ISO-KF, TC 110

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

About this manual

7/56

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

Pictographs used in the document indicate useful information.

Note

Tip

1.3.3 Stickers on the product

This section describes all the stickers on the product along with their meaning.

C US

TÜV Rheinland

Oil

S/N

Mod.

HiPace 30

PM P05 280

- - - - - - - -

P/N

n, f

Mass Made in Germany 2019/05

PM 183 900 -T

90000 1/min, 1500 Hz

2.0 kg

D-35614 Asslar

Rating plate

The rating plate of the turbopump is located on the lower part

of the vacuum pump.

Rating plate of the electronic drive unit

The electronic drive unit rating plate is located on the top

Operating instructions note

This sticker indicates that this operating instructions must be

read before performing any tasks.

Protection class

This sticker describes protection class 1 for the product. Its

placement indicates the position for the ground connection.

warranty seal

Closure seal

The product is sealed ex-factory. Damaging or removing a clo-

sure seal results in loss of the warranty.

Fig. 1: Position of the labels on the product

1 Operating instructions note 4 Rating plate of the turbopump

2 Electronic drive unit type plate 5 Information regarding ground connection

3 Closure seal

About this manual

8/56

1.3.4 Abbreviations

Abbreviation Meaning in this document

CF Flange: Metal-sealed connector in accordance with ISO 3669

dDiameter value (in mm)

DC Direct current

DCU Display Control Unit.

DN Nominal diameter as size description

fRotation speed value of a vacuum pump (frequency, in rpm or Hz)

HPU Handheld Programming Unit.

HV High vacuum flange, high vacuum side

ISO Flange: Connector in accordance with ISO 1609 and ISO 2861

LED Light emitting diode

PE Earthed conductor (protective earth)

[P:xxx] Electronic drive unit control parameters. Printed in bold as three-digit number in

square brackets. Frequently displayed in conjunction with a short description.

Example: [P:312] software version

S1 S1 switch on power supply pack

TTemperature (in °C)

TC Turbopump electronic drive unit (turbo controller)

TPS Voltage supply (turbo power supply)

VV Fore-vacuum flange, fore-vacuum connection

WAF Width across flats

X3 15-pole D-Sub connecting socket on the turbopump electronic drive unit

Tbl. 1: Abbreviations used in this document

1.4 Trademark proof

●Torx® is a registered trading name of ACUMENT INTELLECTUAL PROPERTIES, LLC.

●Profibus® is a registered trading name of Profibus Nutzerorganisation e.V.

About this manual

9/56

2 Safety

2.1 General safety instructions

This document includes the following 4 risk levels and 1 information level.

DANGER

Imminent danger

Indicates a hazardous situation which, if not avoided, will result in death or serious injury.

►Instructions on avoiding the hazardous situation

WARNING

Possibly imminent danger

Indicates a hazardous situation which, if not avoided, could result in death or serious injury.

►Instructions on avoiding the hazardous situation

CAUTION

Possibly imminent danger

Indicates a hazardous situation which, if not avoided, could result in minor or moderate injury.

►Instructions on avoiding the hazardous situation

NOTICE

Danger of property damage

Notice is used to address practices not related to physical injury.

►Instructions on avoiding property damage

Notes, tips or examples indicate important information on the product or on this document.

2.2 Safety instructions

All safety instructions in this document are based on the results of the risk assessment carried out in

accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-

ble, all life cycle phases of the product were taken into account.

Risks during transport

WARNING

Danger of serious injury due to falling objects

Due to falling objects there is a risk of injuries to limbs through to broken bones.

►Take particular care and pay special attention when transporting products manually.

►Do not stack the products.

►Wear protective equipment, e.g. safety shoes.

Safety

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