Pfeiffer Vacuum HIPACE 1500 C Manual de usuario

OPERATING INSTRUCTIONS

Translation of the Original

HIPACE 1500 C

Turbopump

Dear Customer,

Thank you for choosing a Pfeiffer Vacuum product. Your new turbopump is designed to

support you by its performance, its perfect operation and without interfering your individual

application. The name Pfeiffer Vacuum stands for high-quality vacuum technology, a

comprehensive and complete range of top-quality products and first-class service. With this

expertise, we have acquired a multitude of skills contributing to an efficient and secure

implementation of our product.

Knowing that our product must not interfere with your actual work, we are convinced that our

product offers you the solution that supports you in the effective and trouble-free execution of

your individual application.

Please read these operating instructions before putting your product into operation for the

first time. If you have any questions or suggestions, please feel free to contact info@pfeiffer-

vacuum.de.

Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on

our website.

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

2/66

Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Applicable documents 7

1.1.2 Variants 7

1.2 Target group 7

1.3 Conventions 7

1.3.1 Instructions in the text 7

1.3.2 Pictographs 8

1.3.3 Stickers on the product 8

1.3.4 Abbreviations 9

1.4 Trademark proof 10

2 Safety 11

2.1 General safety information 11

2.2 Safety instructions 11

2.3 Safety precautions 16

2.4 Limits of use of the product 16

2.5 Proper use 17

2.6 Foreseeable improper use 17

2.7 Personnel qualification 18

2.7.1 Ensuring personnel qualification 18

2.7.2 Personnel qualification for maintenance and repair 18

2.7.3 Advanced training with Pfeiffer Vacuum 19

3 Product description 20

3.1 Function 20

3.1.1 Cooling 20

3.1.2 Rotor bearing 20

3.1.3 Drive 20

3.2 Scope of delivery 20

3.3 Identifying the product 21

3.3.1 Product types 21

3.3.2 Product features 21

4 Transportation and Storage 22

4.1 Transport 22

4.1.1 Transport in vertical position 22

4.1.2 Transport in horizontal position 23

4.2 Storage 24

5 Installation 25

5.1 Preparatory work 25

5.2 Connecting the high vacuum side 26

5.2.1 Requirements for the dimensioning of a counter flange 26

5.2.2 Considering earthquake protection 26

5.2.3 Using a splinter shield or protective screen 27

5.2.4 Using the vibration compensator 27

5.2.5 Mounting orientations 28

5.2.6 Attaching ISO-K flange onto ISO-K 29

5.2.7 Attaching ISO-K flange to ISO-F 29

5.2.8 Attaching ISO-F flange to ISO-F 31

5.3 Filling the operating fluid 32

5.4 Connecting fore-vacuum side 33

5.5 Connecting accessories 35

5.6 Connecting sealing gas 35

5.7 Connecting the electrical supply 36

Table of contents

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5.7.1 Implement electrical safety measures 36

5.7.2 Grounding vacuum pump 36

5.7.3 Establishing the electric connection 37

6 Operation 38

6.1 Commissioning 38

6.2 Operating modes 39

6.2.1 Operation without operating unit 39

6.2.2 Operation via multi-function connection "remote" 39

6.2.3 Operation via Pfeiffer Vacuum display and control units 39

6.2.4 Operation via field bus 39

6.2.5 Operation via connection "E74" 40

6.3 Switching on the turbopump 40

6.4 Operation monitoring 40

6.4.1 Operating mode display via LED 40

6.4.2 Temperature monitoring 41

6.5 Switching off and venting 41

6.5.1 Switching off 41

6.5.2 Venting 42

7 Maintenance 43

7.1 General maintenance information 43

7.2 Maintenance intervals and responsibilities 43

7.3 Changing the operating fluid 44

7.3.1 Draining operating fluid 44

7.3.2 Filling the operating fluid 45

7.4 Replacing the electronic drive unit 46

7.4.1 Removing electronic drive unit 47

7.4.2 Installing the electronic drive unit 48

7.4.3 Confirming the speed specification 49

8 Decommissioning 50

8.1 Stillsetzen für längere Zeit 50

8.2 Recommissioning 50

9 Recycling and disposal 52

9.1 General disposal information 52

9.2 Dispose of turbopumps 52

10 Malfunctions 53

11 Service solutions by Pfeiffer Vacuum 55

12 Spare parts 57

13 Accessories 58

13.1 Accessory information 58

13.2 Ordering accessories 58

14 Technical data and dimensions 60

14.1 General 60

14.2 Technical data 60

14.3 Substances in contact with the media 62

14.4 Dimensions 62

Declaration of Conformity 64

Table of contents

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List of tables

Tbl. 1: Stickers on the product 9

Tbl. 2: Abbreviations used in this document 10

Tbl. 3: Permissible ambient conditions 17

Tbl. 4: Product designation of Pfeiffer Vacuum HiPace turbopumps 21

Tbl. 5: Turbopump features 21

Tbl. 6: Delivered drive power depending on the supplied mains voltage 21

Tbl. 7: Requirements for the dimensioning of high vacuum connection supplied by

the customer

Tbl. 8: Reducing turbopump pumping speed through the use of a splinter shield or

protective screen

Tbl. 9: Factory pre-set accessory connections on the electronic drive unit 35

Tbl. 10: Terminal lay-out of the power supply connector 37

Tbl. 11: Preconfigured settings for turbopumps when delivered 38

Tbl. 12: Behavior and meaning of the LEDs on the electronic drive unit 41

Tbl. 13: Factory settings for delayed venting in turbopumps 42

Tbl. 14: Characteristic nominal rotation speeds of the turbopumps 49

Tbl. 15: Troubleshooting turbopumps 54

Tbl. 16: Available spare parts 57

Tbl. 17: Accessories | HiPace 1500 C 59

Tbl. 18: Conversion table: Pressure units 60

Tbl. 19: Conversion table: Units for gas throughput 60

Tbl. 20: Technical data for HiPace 1500 C 61

Tbl. 21: Materials that make contact with the process media 62

List of tables

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List of figures

Fig. 1: Position of the stickers on the product 9

Fig. 2: Design of HiPace 1500 C and UC versions 20

Fig. 3: Slinging points for vertical transport of the turbopump without packaging 23

Fig. 4: Slinging points for horizontal transport of the turbopump without packaging 24

Fig. 5: Example: Securing against displacement and tipping caused by external vi-

brations

Fig. 6: Mounting orientations of the standard version, upright 28

Fig. 7: Mounting orientations of the U version, overhead 28

Fig. 8: Alignment of the fore-vacuum connection with horizontal mounting orienta-

tion

Fig. 9: Flange connection ISO-K to ISO-F, bracket screws 29

Fig. 10: Flange connection ISO-K to ISO-F, hexagon head screw and tapped hole 30

Fig. 11: Flange connection ISO-K to ISO-F, stud screw and tapped hole 30

Fig. 12: Flange connection ISO-K to ISO-F, stud screw and through hole 30

Fig. 13: Flange connection ISO-F, hexagon head screw and tapped hole 31

Fig. 14: Flange connection ISO-F, hexagon head screw and through hole 31

Fig. 15: Flange connection ISO-F, stud screw and tapped hole 31

Fig. 16: Flange connection ISO-F, stud screw and through hole 32

Fig. 17: The position of the filler screws depends on the mounting orientation. Exam-

ple: Standard versions

Fig. 18: The position of the filler screws depends on the mounting orientation. Exam-

ple: U versions

Fig. 19: Example of fore-vacuum connection 34

Fig. 20: Example: Connecting the grounding cable 36

Fig. 21: Examples: Draining operating fluid for the standard and U versions 44

Fig. 22: The position of the filler screws depends on the mounting orientation. Exam-

ple: Standard versions

Fig. 23: The position of the filler screws depends on the mounting orientation. Exam-

ple: U versions

Fig. 24: Removing the electronic drive unit 47

Fig. 25: Fitting the electronic drive unit 48

Fig. 26: Attaching the electronic drive unit 48

Fig. 27: Spare parts 57

Fig. 28: Dimensions of HiPace 1500 C | DN 250 ISO-F 62

Fig. 29: Dimensions of HiPace 1500 C | DN 250 ISO-K 63

List of figures

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

This operating instructions is a customer document of Pfeiffer Vacuum. The operating instructions de-

scribe the functions of the named product and provide the most important information for the safe use of

the device. The description is written in accordance with the valid directives. The information in this op-

erating instructions refers to the product's current development status. The document shall remain valid

provided that the customer does not make any changes to the product.

1.1.1 Applicable documents

Document Number

Operating instructions, Electronic drive unit TC 1200, Standard PT 0239 BN

Operating instructions, Electronic drive unit TC 1200 PB, Profibus PT 0269 BN

Operating instructions, Electronic drive unit TC 1200 E74, according to

Semi E74

PT 0303 BN

Operating instructions, Electronic drive unit TC 1200 DN, DeviceNet PT 0353 BN

Operating instructions, Electronic drive unit TC 1200 EC, EtherCat PT 0455 BN

Operating instructions, Electronic drive unit TC 1200 PN, Profinet PT 0658 BN

Operating instructions of sealing gas valve PT 0229 BN

Declaration of conformity A component of these

instructions

You can find these documents in the Pfeiffer Vacuum Download Center.

1.1.2 Variants

●HiPace 1500 C, DN 250 ISO-F

●HiPace 1500 C, DN 250 ISO-K

1.2 Target group

These operating instructions are aimed at all persons performing the following activities on the product:

●Transportation

●Setup (Installation)

●Usage and operation

●Decommissioning

●Maintenance and cleaning

●Storage or disposal

The work described in this document is only permitted to be performed by persons with the appropriate

technical qualifications (expert personnel) or who have received the relevant training from Pfeiffer Vac-

uum.

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

About this manual

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Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

Pictographs used in the document indicate useful information.

Note

Tip

1.3.3 Stickers on the product

This section describes all the stickers on the product along with their meanings.

CUS

TÜV Rheinland

Oil

S/N

Mod.

HiPace 1500

PM P06 100

- - - - - - - -

P/N

n, f

Mass Made in Germany 2019/07

PM 006 336 -T

37800 1/min, 630 Hz

32.0 kg

D-35614 Asslar

Rating plate (example)

Rating plates of individual assemblies are located on the lower

part of the turbopump or on the relevant attachments.

Operating instructions note

This sticker indicates that this operating instructions must be read

before performing any tasks.

Mounting orientation upright note

This sticker depends on the variant. The sticker shows the valid

spatial positions for the installation and operation of the turbo-

pump.

Overhead mounting orientation note

This sticker depends on the variant. The sticker shows the valid

spatial positions for the installation and operation of the turbo-

pump.

Operating fluid filler screw

This sticker describes the position of the respective filler screw for

operating fluid.

Protection class

This sticker describes protection class 1 for the product. The posi-

tioning indicates the position for the ground connection.

About this manual

8/66

warranty seal

Warranty seal

The product is sealed ex factory. Damaging or removing a warran-

ty seal results in loss of the warranty.

Is stuck on concealed underneath the electronic drive unit.

PURGE

Sealing gas connection note

This sticker describes the position for the exclusive sealing gas

connection.

Tbl. 1: Stickers on the product

532

Fig. 1: Position of the stickers on the product

1 Sticker for operating instructions 5 Sticker for sealing gas connection (purge)

2 Sticker for mounting orientation 6 Sticker for ground terminal

3 Sticker for operating instructions 7 Rating plate for electronic drive unit

4 Sticker for operating fluid 8 Turbopump type plate

1.3.4 Abbreviations

Abbreviation Meaning in this document

AC Alternating current

CCorrosive gas version

dDiameter value (in mm)

DN Nominal diameter as size description

EMS Emergency stop

fRotation speed value of a vacuum pump (frequency, in rpm or Hz)

FKM Fluorinated rubber

HV High vacuum flange, high vacuum side

ISO Flange: Connection in accordance with ISO 1609 and ISO 2861

LED Light emitting diode

PE Protective earth (earthed conductor)

[P:xxx] Electronic drive unit control parameters. Printed in bold as a three-digit number in

square brackets. Frequently displayed in conjunction with a short description.

Example: [P:312] software version

remote 26-pole D-Sub connecting socket on the turbopump electronic drive unit

WAF Width Across Flats

About this manual

9/66

Abbreviation Meaning in this document

TTemperature (in °C)

TC Turbopump electronic drive unit (turbo controller)

UUpside-down version

VV Fore-vacuum flange, fore-vacuum connection

Tbl. 2: Abbreviations used in this document

1.4 Trademark proof

●DeviceNet® is a trademark of Open DeviceNet Vendor Association Inc.

●Profibus® is a trademark of Profibus Nutzerorganisation e.V.

●Profibus® is a registered trade name of Profibus Nutzerorganisation e.V. (Profibus user organiza-

tion).

●EtherCAT® is a registered trade name of Beckhoff Automation GmbH, Germany.

●Han® 3 A is a trademark of HARTING Electric GmbH & Co. KG.

About this manual

10/66

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