Pfeiffer Vacuum ATH 1603 M Manual de usuario

OPERATING INSTRUCTIONS

Translation of the Original

ATH 2300 M/MT

Magnetically levitated turbopump

Disclaimer of liability

These operating instructions describe all models and variants of your product. Note that your

product may not be equipped with all features described in this document. Pfeiffer Vacuum

constantly adapts its products to the latest state of the art without prior notice. Please take

into account that online operating instructions can deviate from the printed operating

instructions supplied with your product.

Furthermore, Pfeiffer Vacuum assumes no responsibility or liability for damage resulting from

the use of the product that contradicts its proper use or is explicitly defined as foreseeable

misuse.

This document is the intellectual property of Pfeiffer Vacuum and all contents of this

document are protected by copyright. They may not be copied, altered, reproduced or

published without the prior written permission of Pfeiffer Vacuum.

We reserve the right to make changes to the technical data and information in this document.

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Table of contents

1 About this manual 7

1.1 Validity 7

1.1.1 Applicable documents 7

1.1.2 Products concerned 7

1.2 Target group 7

1.3 Conventions 7

1.3.1 Instructions in the text 7

1.3.2 Pictographs 7

1.3.3 Labels 8

1.3.4 Abbreviations 9

2 Safety 10

2.1 General safety information 10

2.2 Safety instructions 10

2.3 Safety instructions relating to flammable/pyrophoric materials 12

2.4 Precautions 13

2.5 Intended use 14

2.6 Misuse 14

3 Transportation and Storage 15

3.1 Receipt of the product 15

3.2 Handling the pump 15

3.3 Storage 16

4 Product description 17

4.1 Product identification 17

4.1.1 Scope of delivery 17

4.1.2 Product applications 17

4.2 Human/Machine Interface 18

5 Installation 19

5.1 Equipment installation conditions 19

5.1.1 Installation specifications 19

5.1.2 Securing the equipment and the frame 21

5.2 Positioning the pump 21

5.3 Connecting to the pumping line 23

5.3.1 Pump inlet connection 24

5.3.2 Pump exhaust connection 24

5.4 Connecting the water circuit 25

5.4.1 Procedure for assembling connectors 25

5.4.2 Connecting the pump to the water circuit 26

5.5 Nitrogen circuit connection 27

5.6 Connection of the air inlet solenoid valve 28

5.7 Check that the installation is leak tight 29

5.8 Electrical connection 29

5.8.1 Customer electrical installation protection 30

6 Operation 32

6.1 Preliminary precautions for use 32

6.2 Starting the pump 32

6.2.1 Powering on 32

6.2.2 Pumping start-up 33

6.2.3 Restarting the pump after an emergency equipment stop 33

6.3 Shutting down the pump 34

6.3.1 Pumping shutdown 34

6.3.2 Powering off 35

6.3.3 Prolonged stoppage 35

Table of contents

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6.4 Operation monitoring 35

7 Maintenance 36

7.1 Maintenance safety instructions 36

7.2 Maintenance frequency 37

7.3 On-site maintenance 38

7.4 Exchange procedure by a replacement product 38

7.4.1 Disconnecting the pump from the installation 38

7.4.2 Draining the water circuit 39

7.4.3 Preparing the pump for shipping 39

8 Decommissioning 41

8.1 Shutting down for longer periods 41

8.2 Recommissioning 41

8.3 Disposal 41

9 Service solutions by Pfeiffer Vacuum 42

10 Accessories 44

11 Spare parts 46

12 Technical data and dimensions 47

12.1 General 47

12.2 Technical characteristics 47

12.3 Environmental characteristics 48

12.4 Cooling water characteristics 49

12.5 Nitrogen characteristics 49

12.6 Electrical characteristics 50

12.7 Dimensions and weight 50

UK Declaration of Conformity 55

EC Declaration of Conformity 56

Table of contents

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List of tables

Tbl. 1: Loads exerted on the equipment 20

Tbl. 2: Securing the high vacuum flange (inlet flange) 21

Tbl. 3: Conversion table: Pressure units 47

Tbl. 4: Conversion table: Units for gas throughput 47

Tbl. 5: Environmental characteristics 49

Tbl. 6: Cooling water characteristics 49

Tbl. 7: Nitrogen characteristics 49

Tbl. 8: Electrical characteristics of the pump 50

Tbl. 9: Electrical characteristics of the customer’s network 50

List of tables

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List of figures

Fig. 1: Description of an ATH 2300 M pump 18

Fig. 2: Description of an ATH 2300 MT pump 18

Fig. 3: Mechanical connection of the pump to the equipment 19

Fig. 4: Graph of the loads exerted on the equipment - ATH 2300 M 20

Fig. 5: Installing the pump horizontally 22

Fig. 6: Installing the pump inlet facing up 23

Fig. 7: Purge flow diagram 27

Fig. 8: ATH 2300 M dimensions 50

Fig. 9: ATH 2300 MT Dimensions 51

Fig. 10: Dimensions of ATH 2300 MT with OBC 52

Fig. 11: Dimensions of Purge solenoid valve 53

Fig. 12: Dimensions of Air inlet solenoid valve 53

Fig. 13: Dimensions of water valve 54

Fig. 14: Weight of ATH 2300 M-MT 54

List of figures

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1 About this manual

IMPORTANT

Read carefully before use.

Keep the manual for future consultation.

1.1 Validity

These operating instructions are a customer document of Pfeiffer Vacuum. The operating instructions

describe the functions of the named product and provide the most important information for the safe use

of the device. The description is written in accordance with the valid directives. The information in these

operating instructions refers to the product's current development status. The document shall remain

valid provided that the customer does not make any changes to the product.

1.1.1 Applicable documents

Document Part number

Operating instructions for Magpower 129056

Operating instructions for OBC V4 129285

Declaration of conformity included with these operating instructions

1.1.2 Products concerned

This document applies to products with the following part numbers:

Part Number Description

Q2xxxxxx ATH 2300 M pumps for clean applications

Qxxxxxxx ATH 2300 MT pumps for heavy-duty applications

1.2 Target group

This user manual is intended for all persons in charge of transport, installation, commissioning/decom-

missioning, use, maintenance or storage of the product.

The work described in this document must only be carried out by persons with suitable technical training

(specialized staff) or persons who have undergone Pfeiffer Vacuum training.

1.3 Conventions

1.3.1 Instructions in the text

Usage instructions in the document follow a general structure that is complete in itself. The required ac-

tion is indicated by an individual step or multi-part action steps.

Individual action step

A horizontal, solid triangle indicates the only step in an action.

►This is an individual action step.

Sequence of multi-part action steps

The numerical list indicates an action with multiple necessary steps.

1. Step 1

2. Step 2

3. ...

1.3.2 Pictographs

Pictographs used in the document indicate useful information.

About this manual

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Note

Tip

1.3.3 Labels

PURGE Purge circuit connection

PUMP EXHAUST Pump exhaust

WATER MAX Pr 7 bar/101 psi Maximum water circuit pressure

WATER Water circuit connection

Functional grounding connection

LOCK

Locking the connector before using the pump. Do not disconnect

before the pump has stopped

Direction of rotation of the pump rotor

60kg 31000rpm; M:40Vrms 1033Hz 12A

Q2662100

AHC4230 ATH2300M

2018

Product rating plate (example)

This label indicates that certain internal components carry an

electric charge and can cause electric shock if touched: be-

fore working on the pump, always either disconnect it, or lock

out/tag out the installation breaker in the appropriate manner.

This label indicates that the product should not be handled

manually due to its weight and that appropriate handling devi-

ces should always be used.

Don’t remove the pump

connector when the pump is

running

This label means that the user must lock the connector before

using the pump. Do not disconnect before the pump has stop-

ped.

DO NOT TOUCH WHEN

THE PUMP IS RUNNING

This label warns users about the risk of crushing or cutting

due to moving parts: keep a safe distance and/or keep your

hands away from the moving parts.

SEE MANUAL BEFORE USE

Any person responsible for installation or operation of the

product must first refer to the operating manual.

The product comes with a sheet of labels including other

language versions. The installer must stick these labels

to the most appropriate and visible place on the pump to

warn the operator about potential hazards:

About this manual

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This label warns users that they risk being injured if their

hands come into contact with a hot surface: protective gloves

must be worn at all times when working on the pump.

Exposure may result in severe injury or death.

Preventive maintenance must be done by trained

personnel only.

This label warns users about pumped process gases that can

be dangerous or toxic and lead to severe injury or death. It

specifies that only trained personnel should perform preven-

tive maintenance operations.

1.3.4 Abbreviations

AMB Active magnetic bearings

EMC Electromagnetic compatibility

Exh. Exhaust

EMS Emergency Machine Stop

HHR Hand Held Remote

IN Inlet flange

LEL Lower Explosive Limit

MPump version without temperature management system (no TMS)

MT Pump version equipped with a temperature management system (TMS)

Magpower Electronic drive unit (box)

OBC Electronic drive unit mounted to an active magnetic bearing turbopump

TMS Temperature Management System

About this manual

9/58

2 Safety

2.1 General safety information

The following 4 risk levels and 1 information level are taken into account in this document.

DANGER

Immediately pending danger

Indicates an immediately pending danger that will result in death or serious injury if not observed.

►Instructions to avoid the danger situation

WARNING

Potential pending danger

Indicates a pending danger that could result in death or serious injury if not observed.

►Instructions to avoid the danger situation

CAUTION

Potential pending danger

Indicates a pending danger that could result in minor injuries if not observed.

►Instructions to avoid the danger situation

NOTICE

Danger of damage to property

Is used to highlight actions that are not associated with personal injury.

►Instructions to avoid damage to property

Notes, tips or examples indicate important information about the product or about this docu-

ment.

2.2 Safety instructions

All safety instructions in this document are based on the results of the risk assessment carried out in

accordance with Machinery Directive 2006/42/EC Annex I and EN ISO 12100 Section 5. Where applica-

ble, all life cycle phases of the product were taken into account.

WARNING

Risk of crushing when the product is slung

Given the heaviness of the product, there is a risk of crushing during handling operations involving

lifting devices. Under no circumstances shall the manufacturer be liable if the following instructions

are not followed:

►Only qualified staff trained in handling heavy objects are authorized to handle the product.

►The lifting devices provided must be used and the procedures set out in this document must be

followed.

Safety

10/58

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