Pfeiffer Vacuum A3P Series Manual de usuario
Operating instructions
Operating instructions
Translated from original version
Translated from original version
A3P SERIES
Dry pumps for medium duty applications
EN
EN
GB 02862 - Edition 04 - April 12
1/2
A3-P Series dry pumps
Welcome
Applications
P version : for light and medium process.
Feature
Compact design.
Low noise level.
Low vibration level.
Robust and established technology.
High pumping speed (equivalent to pump and blower), in a compact
design.
Advanced monitoring functions.
Benefits
Easy to integrate.
Clean room compatibility.
Highest reliability.
Low operating cost.
Failure of circuit protection.
Special feature
Standby purge (option).
Standby power / high speed option.
Semi S2-0706 standard compatible (option).
Dear Customer,
You have just purchased an
Adixen dry pump. We thank
you and are proud to include
you as one of our customers.
This product has benefited
from adixen Vacuum
Products’s many years of
experience in semiconductor
processes and dry pumping.
For optimum performance
and to obtain full satisfaction
from this equipment, we
recommend that you study
this operating manual before
any intervention on your
pump, in particular, the
chapter on installation and
start up.
adixen Vacuum Products - Operating instructions - A3P Series
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A3-P Series dry pumps
GB 02862 - Edition 04 - April 12
Copyright/Intellectual property:
The use of adixen products are subject to copyright and
intellectual property rights in force in any jurisdiction.
All rights reserved, including copying this document in whole
or any part without prior written authorization from adixen
Vacuum Products.
Specifications and information are subject to change without
notice by from adixen Vacuum Products.
This product complies with the requirements of European Directives,
listed in the Declaration of Conformity contained in G 100 of this
operating instructions
adixen Vacuum Products - Operating instructions - A3P Series
GB 02863 - Edition 07 - Oct 13
1/2
MANUAL P/N: 112241
EDITION : 07 - November 2013 General contents
Operating instructions - A3P Series
English original version
Chapter A INTRODUCTION
A 10 Operating principle
A 20 Description
A 30 Monitoring system
A 40 Technical characteristics
A 50 Accessories
A 60 Options
Chapter B START UP
B 00 Safety instructions
B 01 A3P Series - Hook-up requirements
B 10 Unpacking / Handling / Storage
B 20 Positioning the pump in the pumping installation
B 30 Connection to the cooling circuit
B 40 Inert gas purge connection (N2connection)
B 50 Electrical connection
B 51 Checking the direction of rotation at initial pump start-up (for A603P
pump only)
B 60 Connection to the pumping circuit
B 70 Remote control plug connection
B 80 Safety plug connection
B 90 User plug connection
B 100 EMO plug connection (on A603P / A1003P pump models)
B 110 RS 232 or RS 485 link wiring
B 120 Removable handle (accessory) installation
Chapter C OPERATION
C 00 Safety recommendations for harsh processes
C 10 Operating modes
C 20 Monitoring system parameters
C 25 Safety management
C 40 Operating mode with hand held display module (accessory)
C 41 Start up of the monitoring system
C 42 Monitoring system function table
C 43 Starting mode definition «Hand held display module»
C 44 Saving and loading of pump configuration
C 45 Monitoring system setting for transport
C 70 Use of the inlet isolation valve (accessory)
C 90 Use of the serial link
Chapter D TROUBLESHOOTING
D 00 Safety instruction related to maintenance
D 10 First level of maintenance
D 20 Fault message number table
D 30 Diagnosis and troubleshooting
Chapter E MAINTENANCE INSTRUCTIONS
E 10 Standard repair exchange
E 11 Preliminary precautions
E 12 Draining of the water cooling circuit
E 14 Disconnecting the pump from the installation
E 15 Shipping procedure
E 20 Increase the maintenence parameters
adixen Vacuum Products - Operating instructions - A3P Series
2/2
General contents
Operating instructions - A3P Series
GB 02863 - Edition 07 - Oct 13
MANUAL P/N: 112241
EDITION : 07 - November 2013
English original version
Chapter F MAINTENANCE COMPONENTS
F 00 Spare parts - Instruction of use
F 10 Spare part list
Chapter G ANNEXES
G 100 Declaration of coformity
G 101 Semi certificate
G 110 A103 - Electrical schematic
G 120 A603 - Electrical schematic
G 130 A1003 - Electrical schematic
G 170 Electronic cabinet
G 200 Service
Indicates a potentially hazardous situation which, if not avoided, could
result in moderate or minor injury. It may also be used to alert against
unsafe practices.
Indicates a potentially hazardous situation which, if not avoided, could
result in death or severe injury.
Indicates an imminently hazardous situation that, if not avoided, will result
in death or severe injury (extreme situations).
Indicates a potentially hazardous situation which, if not avoided, could
result in property damage.
adixen Vacuum Products - Operating instructions - A3P Series
GB 02864 - Edition 02 - June 08
1/1
Introduction
Operating Manual - A3P Series
Detailed contents
A
A 10 Operating principle
A 20 Description
A 30 Monitoring system
A 40 Technical characteristics
A 50 Accessories
A 60 Options
adixen Vacuum Products - Operating instructions - A3P Series
GB 02865 - Edition 02 - November 07
1/2
A 10
Operating principle
Designed to minimize
by-product deposition
The equipment is designed to minimize potential by-product
deposition:
By limiting the internal volumes containing gas.
By injecting N2purge on each pump stage to dilute the process
gas.
By regulating the pump temperature to limit gas condensation.
By integrating the silencer inside the pump body to reduce by-
product deposition.
Multi-stage roots
principle
A3-P Range pump functional block consists of 6 Roots type pumping
stages.
The two rotors rotate without touching each other.
%XHAUSTSTAGE 4RANSFERSTAGE 4RANSFERSTAGE 4RANSFERSTAGE
%XHAUST
4RANSFERSTAGE )NLETSTAGE
)NLET
Tightness with
environment
The pump is fitted with ball bearings lubricated with fluorinated
grease.
An overpressure zone is created around the bearing by injecting a
neutral gas.
The pressurization and the seals prevent pumped gases and powders
from migrating towards the bearings.
Neutral gas purging of the bearings is imperative.
Tightness at low pressure
side
Tightness at high pressure
side
The bearings are lubricated by oil splashing.
The tightness is achieved with a deflector and a seal.
adixen Vacuum Products - Operating instructions - A3P Series
2/2
A 10
GB 02865 - Edition 02 - November 07
Operating principle
Tightness at motor side
(center hump)
The vacuum tightness is ensured by the motor design (hermetically
sealed).
This system provides total safety regarding leaks outside the pump and
requires no maintenance.
Tightness at shutdown The pump is fitted with an antisuckback valve in the pump exhaust pipe,
preventing the exhaust being sucked back.
The pump in a
pumping installation
!02ANGE
2OUGH
VACUUM
!TMOSPHERIC
PRESSURE
0ROCESS
CHAMBER
(IGH
VACUUM
)NLET
PRESSURE
2OUGHINGVACUUM
PUMPING
(IGHVACUUM
PUMPING
%XHAUST
adixen Vacuum Products - Operating instructions - A3P Series
GB 02866 - Edition 03 - April 12
1/4
A 20
Description
Description The A3-P Range is composed of the following pumping systems:
A103P pump,
A603P, A1003P pumping group, composed of an A103P functional
block combined with a Roots.
These pumping systems are fully integrated in a compact and enclosed
frame which includes:
The control panel located on the front panel.
The facilities panel located on the rear panel (except inlet port
located on the top for A603P, A1003P pumps).
The electrical interface panel located on the rear panel.
The pumping systems include an intelligent monitoring system.
A hand held display module can be connected to the front or rear
panel to display and program the pump parameters.
A remote control connector (dry contacts / 50 pins plug) located on
the electrical interface panel allows pump control and communication
with the process tool.
A RS 232/485 connector located on the electrical interface panel
allows pump control and communication with the process tool by
means of the serial link protocol.
Interfaces
.PRESSUREREGULATOR
#ONTROLPANEL
&RONTPANEL
%MERGENCYSTOP
/./&&MAINSWITCH
,IGHTINDICATORS
(ANDHELDDISPLAY
MODULECONNECTOR
&ACILITIESPANEL
%LECTRICALINTERFACE
2EARPANEL
)NLETPORT
-AINPOWER
%XHAUSTPORT
7ATER/54
-ASSPIN
7ATER).
%NCLOSURESENSOR
2EMOTECONTROL
CONNECTOR
5SERCONNECTOR
.).
%NCLOSUREEXHAUST
PORT
23CONNECTOR
23
CONNECTOR
(ANDHELDDISPLAY
MODULECONNECTOR
A103P pump
adixen Vacuum Products - Operating instructions - A3P Series
2/4
A 20
GB 02866 - Edition 03 - April 12
Description
A603P / A1003P pump
#ONTROLPANEL
&RONTPANEL
%MERGENCYSTOP
/./&&MAINSWITCH
,IGHTINDICATORS
(ANDHELDDISPLAY
MODULECONNECTOR
&ACILITIESPANEL
%LECTRICALINTERFACE
2EARPANEL
2EMOTECONTROL
CONNECTOR
5SERCONNECTOR
)NLETPORT
)SOLATINGVALVE
CONNECTOR
-AINPOWER
IFHARDWIRE
%XHAUSTPORT .).
7ATER/54
%NCLOSUREEXHAUST
PORT
7ATER).
%-/CONNECTOR
23CONNECTOR
23
CONNECTOR
(ANDHELDDISPLAY
MODULECONNECTOR
%NCLOSURESENSOR
-AINPOWER
IFPLUG
-ASSPIN
.PRESSUREREGULATOR
adixen Vacuum Products - Operating instructions - A3P Series
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