Pfeiffer Vacuum SPM 200 Manual de usuario

Operating Instructions

incl. Manufacturer's declaration

BG 805 210 BE / A (0207) 1

Sputter Process Monitor

SPM 200

2BG 805 210 BE / A (0207) SPM 200.om

In all communications with Pfeiffer Vacuum, please specify the information on the

product nameplates. For convenient reference copy the information for all items of

your system into the corresponding nameplate replicas in this document (®26).

This document applies to products with part numbers

PTM26102 / PTM26104 (SPM 200 without pumping station)

PTM26122 (SPM 200 with pumping station)

PTM25265 (QMA 200 Type 2)

B5181408KY (Power supply SP200)

B5181310AQ (Power supply S106-PX)

The part number can be taken from the product nameplate.

This document is based on firmware version

BG509725-H (or higher)

BG509726-H (or higher)

If your unit does not work as described in this document, please check that it is

equipped with the above firmware version.

We reserve the right to make technical changes without prior notice.

The Sputter Process Monitor is a differentially pumped mass spectrometer unit. It is

used for measuring minute trace contamination in sputter processes at process

pressures up to 2×10-2 mbar.

Training

Pfeiffer Vacuum offers application, operating and maintenance courses for the

best use of this product. Please contact your local Pfeiffer Vacuum

representative.

Prisma™ INFICON AG

Product Identification

Validity

Intended Use

Training

Trademark

BG 805 210 BE / A (0207) SPM 200.om 3

Contents

Product Identification 2

Validity 2

Intended Use 2

Training 2

Trademark 2

1 Safety 4

1.1 Symbols Used 4

1.2 Personnel Qualifications 5

1.3 General Safety Instructions 5

1.4 Liability and Warranty 5

2 Technical Data 6

2.1 System Overview 6

2.2 Standards Implemented 8

2.3 Ambient Conditions 8

2.4 SPM 200 8

2.5 QME 200 9

2.6 Power Supply 9

2.7 Dimensions 10

2.8 Pin Assignment 11

3 Installation 13

3.1 Mechanic Installation 13

3.1.1 Installing the QMA 13

3.1.2 Installing the QME 15

3.2 Electrical Connections 15

3.2.1 Connecting the QME 16

3.2.1.1 Connection 16

3.2.1.2 Control Connection 17

3.2.2 Connecting the Power Supply to the Prisma 19

3.2.3 Connecting the PC 20

3.3 Installing the Software 20

4 Operation 21

4.1 First Time Use 21

4.2 Configuration 22

5 Maintenance 23

5.1 QMA 23

5.1.1 Changing the Filament 23

5.2 QME 25

5.2.1 Cleaning 25

5.2.2 Replacing the Filter Mat 25

5.2.3 "TUNE" of the RF Generator 26

5.2.4 Optimizing the Sensitivity of the Ion Source 27

5.2.5 Replacing the QME 28

6 Accessories and Spare Parts 29

7 Disposal 30

Appendix 31

A: LAN Interface 31

B: Literature 32

Declaration of Contamination 33

Manufacturer's Declaration 34

For cross-references within this document, the symbol (®2XY) is used, for cross-

references to other documents, the symbol (®&[Z]).

4BG 805 210 BE / A (0207) SPM 200.om

1 Safety

DANGER

Information on preventing any kind of physical injury.

WARNING

Information on preventing extensive equipment and environmental damage.

Note

Information on correct handling or use. Disregard can lead to malfunctions or

minor equipment damage.

Note

Caution: dirt sensitive area

Dirt prolongs the pumpdown process.

Always wear clean, lint-free gloves and use clean tools when working

in this area.

... please contact your nearest Pfeiffer Vacuum service center.

The result is O.K.

The result is not as expected.

The lamp/display is lit.

The lamp/display flashes.

The lamp/display is dark.

Labeling

1.1 Symbols Used

BG 805 210 BE / A (0207) SPM 200.om 5

Skilled personnel

All work described in this document may only be carried out by persons who

have suitable technical training and the necessary experience or who have been

instructed by the end-user of the product.

· Adhere to the applicable regulations and take the necessary precautions for the

process media used.

Consider possible reactions between the product materials and the process

media.

Consider possible reactions of the process media due to the heat generated by

the product.

· Adhere to the applicable regulations and take the necessary precautions for all

work you are going to do and consider the safety instructions in this document.

· Before beginning to work, find out whether any vacuum components are con-

taminated. Adhere to the relevant regulations and take the necessary precau-

tions when handling contaminated parts.

Communicate the safety instructions to all other users.

Pfeiffer Vacuum assumes no liability and the warranty becomes null and void if the

end-user or third parties

· disregard the information in this document

· use the product in a non-conforming manner

· make any kind of interventions (modifications, alterations etc.) on the product

· use the product with accessories not listed in the corresponding product

documentation.

The end-user assumes the responsibility in conjunction with the process media

used.

1.2 Personnel Qualifications

1.3 General Safety

Instructions

1.4 Liability and Warranty

6BG 805 210 BE / A (0207) SPM 200.om

2 Technical Data

Note

In all communications with Pfeiffer Vacuum, please specify the

information on the product nameplates. For convenient reference copy

the information for all items of your system into the corresponding

nameplate replicas in this document.

Typ:

No:

F-No:

V A

Pfeiffer Vacuum, D-35614 Asslar

Typ: No: F-No:

Pfeiffer Vacuum

D-35614 Asslar

Only for PTM26102 / PTM26104

2.1 System Overview

Quadrupole electronics

QME 200 with 90° connection

Analyzer QMA 200

SPM Channeltron

Power supply SP 200

BG 805 210 BE / A (0207) SPM 200.om 7

Version: 6.xx SPM 200 - x

Key-Nbr.: xxxx

No: PT 882239 - T

Date: Copyright (C)

QUADSTAR 422 QMS 422

®229

Comprising:

TMU 071 Turbomolecular drag pump, air cooled, with vent valve ®&[8]

MVP 015 Diaphragm pump ®&[9]

PCU 200 Pump control unit ®&[5]

Power supply for PCU 200 ®&[8]

SVV 040 PM Gate valve ®&[11]

RC 200 Remote control unit ®&[6]

Power cable

Software Quadstar

Accessories

Pumping system

8BG 805 210 BE / A (0207) SPM 200.om

Safety

QME/QMA EN 61010-1:1993

IEC1010-1:1990 +A1:1992

protection class I

SP 200 DIN EN 60950

IEC 950, UL 1950

CSA 22.2 No. 234

EMC

immunity EN 50082-2

emission EN 50081-1

Use indoors only

Altitude max. 2000 m NN

Type of protection IP 30

Contamination degree 2

Temperatures

storage/transport -25 … +70 °C

operation QME 0 … +40 °C

SP 0 … +40 °C

Relative humidity max. 80% up to 31 °C,

linearly decreasing to 50% at 40 °C

SPM 200

Mass range u 1 … 100 1 … 200

Detector type Channeltron / Faraday

Detection limit (in argon at

1×10-2 mbar)

hydrogen

water vapor

nitrogen

oxygen

carbon dioxide

ppm

ppb

< 3

< 500

< 100

<20

<500

<200

Contribution to neigh-

boring mass 40/41 ppm < 50

Process pressure max. 1) mbar 1×10-2

QMA operating

temperature °C 0 … +100

Bakeout temperature

(QME removed) °C max. +200

SPM ion source 2 yttrium oxide filaments

Mounting orientation any (depending on turbo pump)

Weight kg 8

Connection flange DN 40 CF

1) Versions for process pressures up to 10 mbar on request.

2.2 Standards Implemented

2.3 Ambient Conditions

2.4 SPM 200

BG 805 210 BE / A (0207) SPM 200.om 9

Measurement channels 64

Measurement modes Scan analog, Scan Bargraph, MID

Measurement cycles Mono-/multichannel 1 … 9999 cycles

or repeat

Measurement data buffer 128 Kbyte

MID-dwell 10 ms ... 60 s

Measuring speed

scan analog + bargraph peak

scan bargraph stair

200 ms/u … 60 s/u

20 ms/u … 60 s/u

Electrometer amplifier 10-5 … 10-12 A (f.s.), fix and autorange

Signal filter FIR Filter

Power supply 24 V= / 2.0 A

Interfaces

RS-232-C

LAN

300 … 19200 bit/s

Arcnet, fiber-optic (1000 m max.) 2.5 Mbit/s

Inputs

2 analog differential

1 compact gauges or

external interlock

1 digital in (EXT_RUN)

-5.12 … +5.12 V, 11 bit, 1)

TPR 265, PKR 261

Sink current 0.5 mA (5 V=)

TTL, pull-up 4.7 kohm to +5 V

Outputs

4 analog

2 relay

-5.12 … +5.12 V, 16 Bit, 1 mA max., 200 ohm

closing contact, 24 V~, 30 V=, 1 A

Weight 2.8 kg

SP 200 S 106 -PX

Voltage 90 … 260 V~ 95 … 264 V~

Frequency 47 … 63 Hz 50/60 Hz

Power specifications 1.5 A @ 115 V / 60 W

0.8 A @ 230 V / 60 W

2.7 A max.

Output voltage 24 V=, stabilized 24 V=, stabilized

Isolation 10 Mohm min., output

to ground

> 500 V=

output to ground

Overvoltage category II (according to

EN 61010)

Weight 0.7 kg 2.0 kg

1) By series connection of 2 110 kohm resistors, 1 %, in both lines, the range is

extended to ±10.24 V.

2.5 QME 200

2.6 Power Supply

10 BG 805 210 BE / A (0207) SPM 200.om

321

390 35

2.7 Dimensions

SP 200

SPM 200

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