Omron ZS Manual de usuario

Advanced Industrial Automation

» Sub-micron laser measurement

» Easy to use, integrate and operate

» Superb scalability

ZS FAMILY SERIES

The scalable measurement sensor for all surfaces

Key features

• Accurate and fast – 0.25 μm at less

than 110 μs sampling time

• One sensor fits all – stable

measurement of virtually any

material structure such as glass,

foil or rubber

• Powerful – can accurately measure

thickness, warpage and evenness

thanks to its multi-unit controller

• Smart – data storage unit for

traceability and data logging

• Easy to use – built-in user interface

and powerful, user-friendly PC

configuration tool

ZS laser displacement sensors comprise a smart,

modular and scalable family that offers a platform

approach to solve the most challenging measurement

tasks. Based on Omron CMOS technology, the ZS-L

measures at sub-micron accuracy in a fraction of a

millisecond – and virtually any texture. The ZS-L series

comes with a sensor controller, a data storage unit and

a multi-controller that coordinates up to 9 units.

It enables accurate measurement of material

thickness, evenness and warpage.

Enhanced flexibility

through smart scalability

Sensor heads ZS-LD

CMOS technology packed into an

ultra-compact sensor head.

• Wide choice of sensor head

from 20 mm to 350 mm

sensing distance

• Digital technology leads

to high immunity to noise

disturbance, allowing long

cable extension up to 22 m

• Up to IP67 protection class

• Laser class 2

Sensor

Head

350

200

130

ZS-LD350S

(long range)

ZS-LD200

ZS-LD130

ZS-LD80

ZS-LD50

ZS-LD40T

ZS-LD20T

900 x 25 µm Laser spot/beam size

2000 x 35 µm

900 x 60 µm

900 x 100 µm

600 x 70 µm

240 µm dia.

CMOS based sensor head

Regular-reflective

models

Diffuse-reflective

models

Measuring centre

distance

Advanced Industrial Automation

SmartMonitor tool

Professional tool for

configuration, set up and

monitoring.

• Provides high-speed

simultaneous multi-channel

graphs

• Includes Excel macro for

simple analysis

• Supports documentation and

quality assurance tasks

ZS-DSU data storage unit

Fast data storage allowing easy

debugging and system set up.

• High-speed sampling rate:

150 μs

• Powerful support for logging

data using various trigger

functions

• Supports compact flash card

for extended memory

ZS-MDC multi-sensing

controller unit

Coordinates data transfer between

sensor controllers and performs

high-speed calculation for

complex measurements tasks.

• Coordinates data between

up to nine controllers

• Fast calculation of

measurements such as:

- Thickness

- Evenness

- Warpage

- 4 different tasks

- Free math

ZS-LDC sensor controller

Ensures you always have the best

measurement performance.

• Supports a wide range of

sensor heads from short range

(20 mm) to long range

(350 mm)

• High accuracy – 0.4 μm

• Fast response time – 110 μs

• USB and RS-232 port

• Intuitive set up through

built-in keypad and digital

operator

Control Operate

Measures various types of different targets, offering high accuracy on all surfaces

CMOS technology enables unique, surface-independent detection

Business Card size

Monitor Record

Up to 9 sensor controllers

Type profile inspection Wafer thickness and warping inspection Glass evenness inspection PC board height inspection

High-speed bus

Smart setting software for advanced functionality

The SmartMonitor Zero Professional software provides

a function that changes measurement levels (edge thresholds)

to reduce error caused by light penetration, enabling many

types of PCBs to be handled. The measurement level can be

increased to adjust the measurement position for peak light

reception. This function enables stable detection of PCB

surfaces. If there is insufficient light in high-speed mode,

gain settings (0 to 5) can be used to compensate.

To achieve stable sensing of PCBs, resins, black rubber, and

other light-penetrating objects, all you need to do is select the

surface type.

ZS-LD50/LD80

Stable measurements for PCBs, black resin and metal

Smart set up for

different surfaces

Direct measurement of PCB surface profile structure

Reflection signal quality is traced

during measurement. Reliable and

safe operation is ensured through

easy set up and control

Simply select your surface

type and the ZS smart

sensor concept sets all

specific parameters for

your application

Direct setting with

function keys

Advanced Industrial Automation

A New Glass Mode

Different reflections can be measured on the CMOS

Detecting transparent objects

When a light beam hits the surface of an object, a certain

amount of the light is reflected, some is transmitted through

the object and the rest is absorbed. In the case of transparent

materials such as glass, the ZS-L can obtain reflected light from

the top surface, from the middle and from the bottom section

of glass.

• Superior features for semiconductor wafer, glass and other

measurements requiring precision.

• An unprecedented stationary measurement precision

of 0.01 μm; the highest in this product class.

• Enables stable measurement of height and undulations

in transparent, coated glass on worktables. Menus let you

easily set the measurement conditions for a wide range

of glass to achieve stable measurements.

• Outstanding measurement stability and high-speed

response at submicron resolution enables measurement

of flat glass thickness during the production process.

ZS-LD20T/ZS-LD40T

The smart way to measure glass and mirror surfaces

Glass

Glass thickness

Glass gap

Set sensing directly

FUN (setting mode)

Direct setting with

function keys

Small and compact

The ZS-LDC controller is the size of a business card and is

packed with Omron’s leading-edge digital technology.

See what the sensor is doing

In RUN (measurement) mode, measured values and information

are displayed using 2 rows of 8-segment LEDs. The large LED

display improves visibility. Measurement information includes

the threshold, current, resolution, and received light amount

and is available with simple key operations. LCD screens can

be customized to change the display of desired information

to terminology that is easier to understand.

Easy to use (no programming)

In FUN (setting) mode, setting menus are displayed on the

2 rows of the LCD. The LCD’s many display capabilities provide

clear guidance for making settings. Function keys correspond

to displayed menu items and measurement conditions, and

other settings can be made intuitively. You can also easily

switch the display language. Communication with the operator

is better than ever before.

Connect directly to a PC

A USB 2.0 and RS-232C connection are provided as standard.

LVDS, a new-generation high-speed communications interface,

is used between the sensor head and controller, which is an

industry first. If the USB is used to connect to the computer,

high-speed all-digital measurement data transfer is possible.

ZS-LDC – The most compact fully digital controller

for the highest control functionality

Set sensing directly

FUN (setting mode)

Function keys and menu-

driven operation for easy

set-up. Teach-to-measure

function is also available

Connect directly

to a computer

using USB

Small and compact

controller, as small as

a business card

90 mm

60 mm

Clear 6-digit 2-line data

display measures value

against calculated one

Advanced Industrial Automation

ZS-MDC – Connect & Calculate:

Affordable multi-point sensing has never been easier

For complex applications such as measurement and inspection

of flatness, thickness, steps etc., the ZS-MDC is the ideal

answer. It can coordinate up to nine sensor controllers

in split milliseconds.

Measurement Tools

• Height measurement

• Step and gap measurement X-Y

• Thickness measurement K-(A+B)

• Flatness measurement Max-Min

• Average measurement

• Eccentricity measurement Peak to Peak

• Warpage/Evenness K+mX+nY

Multi-point measurement

(flatness of resins or metals)

ZS-MDC The support software makes

settings easy

Sensor Heads Multi-controller SmartMonitor

PC-based user software

for easy system setup,

monitoring and data logging

Processing results

USB

For optimum quality of produced goods and zero defect

production, you need highest precision and smart

measurement tools. The ZS-HL expansion of the ZS series

enables you to solve the most powerful measurement

inspection tasks.

ZS-H – The highest precision

combined with multitasking capabilities

90 mm

60 mm

• Long range sensor heads

Unique 1500 mm sensing distance

• Highest precision and linearity

0.25μm with 0.05% linearity

• Head range includes nozzle gap sensor

for leading edge inspection of moving targets

• Powerful multitasking function

4 measurement tools in one controller

When simultaneous

measurement of distance

to glass, glass thickness, gap

etc., is required in glass

measurement applications.

Setting example

Task 1: Average

Task 2: Thickness

For simultaneous

measurement of HDD surface

deflection and distance to

HDD surface.

Setting example

Task 1: Average, Average hold

Task 2: Average, Point-to-point hold

For detection of small

recesses and protrusions in

measurement location.

Setting example

Task 1: Step

For measurement of steps

in different locations with

moving sensor or

workpiece.

Setting example

Task 1: Average

Self-down trigger

Average hold

With delay

Task 2: Average

Average hold

With delay

Task 3: Calculation

(Task 2 – Task 1)

Trigger level

Delay time 1

Delay time 2

Enlarged

Simultaneous measurement and output of up to 4 features

Advanced Industrial Automation

Smart scalability ensures the optimum solution

Take advantage of the excellent scalability of the ZS family and

set up your application by choosing the ZS controller and head

that best fit your application. ZS-L and ZS-H are fully compatible

and can be mixed within a system.

Sensors Controllers Peripheral Devices

ZS-HLD Series Sensor Controllers

Multi-Controllers Data Storage

Units

Expansion I/O Units

ZS-RPDZS-HLDC

ZS-LDC

ZS-MDC ZS-DSU

High-speed Input Boards (PC)

SmartMonitor (PC)

ZS-SW_ _E V3

Parallel I/O

USB

RS-232C

Analog

NS SmartMonitor

ZS-PSW_ _E

Digital Panel Meter

Connection Cable

ZS-XC02D

Controller

ZS-HLDC

Digital Equalizer

ZS-XEQ

Flexible Long-distance Extension Cable

ZS-XC15CR/XC25CR

Digital Equalizer

ZS-XEQ

SENSOR HEAD

ZS-HLDS

1 The ZX-HLDC can be connected to a ZS-HLD/LD-series Sensor 2 Head.

2 The ZX-LDC can be connected to a ZS-LD-series Sensor Head.

ZS-series Long-distance Extension Cable

ZS-LD Series

ZS-HLDC ZS-LDC

… to the most powerful sensing application using ZS family heads, controllers, multi-controllers and data storage units.

The ZS family: The most powerful smart measurement sensor system in the industry.

From the easiest

to set up single

sensor application…

Multitask Mode

Sensing TASK1 TASK2 TASK3 TASK4

I/O Settings

Measurement

point

Filter Output

Top Operation Menu

Single Task Mode (Standard Mode)

TASK1

I/O Settings

Sensing

Filter Output

PLCs etc.

The ultimate tool for easy system set up, parameter

configuration and data logging, the SmartMonitor offers:

• Up to 9-channel data logging and display simultaneously

• Data logging intervals as short as 2 ms for precise

monitoring at critical transients

• Export to Excel files

• Comprehensive macros using filters, slope compensation,

filter median transitions, differentiation, integration, math

functions and more

ZS-SW11E

The SmartMonitor PC tool that puts you in full control

Connect directly

to a computer

using USB

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