Harmonic Drive LSA-10A-30-D-130 Manual técnico

Galvanometer Scanner System

LSA-10A-30-D-130 Technical Document

(Scanner: LSA-10A-30/Driver: PSM-130)

●We thank you for purchasing the Galvanometer Scanner LSA Series

System.

●Any mishandling or misuse of this product may result in unexpected

accidents and shorten the life of the product. Please read this

document thoroughly and use accordingly to ensure safe prolonged

use.

●Product specifications are subject to change without notice for

improvement purposes.

●Keep this manual in a convenient location and refer to it whenever

necessary in operating or maintaining the units.

●The end user of the actuator should have a copy of this manual.

ISO14001

ISO9001

LSA-10A-30-D-130 Technical Document

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Warning: Indicate anything that may cause

loss of human life or serious

physical injury if mishandled.

Warning

For Safe Use of the

LSA and PSM Series Servo Systems

Caution: Indicate anything that may cause

serious physical injury or cause

physical damage to the product if

mishandled.

Limitation of Applications:

The equipment listed in this document may not be used for the following applications:

*Space equipment *Aircraft & Aircraft Equipment *Nuclear Equipment *Household Apparatus *Vacuum equipment *Automobiles &

Automotive Parts *Game Machines *Machines or Devices effecting directly the human body *Machines or devices to transport people

*Instruments or Apparatus for special environments.

Please consult us if you intend to use the products in one of the areas mentioned above.

* If these products are used in equipment that may cause serious physical injury or loss of human life, please ensure adequate safeguards are in

place to prevent accidents in case the output cannot be controlled due to damage of the product.

Precautions when Using the Scanner/Driver

Please ensure proper protections from interference of noise and adequate installation.

● Interference of noise on the signal line may cause vibrations and malfunctions. Please ensure the following conditions.

* Please separate from a power cable.

* Please use the possible shortest cables for the LSA and PSM.

* Please connect the ground terminals of the scanner and driver to a Type 3 ground at one point.

Caution

Warning

Precautions for Designing Please read this Technical Document before designing.

Please utilize in the following defined environment.

● The scanner is not sealed and must therefore only be used indoors, where the following conditions are provided:

*Ambient OperatingTemperature: 0°C to 40°C *Ambient Operating Humidity: 20% to 85% RH (non-condensing)

* Vibration: Under 24.5 m/s

* No contamination by water, oil, or foreign matter * No corrosive, inflammable, or explosive gas

If light beam such as lasers, etc. that may cause physical injury are used, please ensure adequate

safeguards are in place to prevent accidents in case the scanner/driver becomes uncontrollable.

Warning

Operating Precautions Please read this Technical Document before operating.

Disposal

Caution

Please dispose as industrial wastes.

● All products or parts have to be disposed as industrial wastes.

Please do not directly connect the scanner’s

motor and sensor wires to the outlet.

●Please ensure that this

equipment is not directly

connected to a commercial power source. The scann

may breakdown and cause a fire.

Caution

Please protect the scanner

from impacting and

shocking.

●

Please do not bump the scanner as the sensor is directly

connected to the scanner.

●

The operation of the scanner cannot be assured if the sensor

t b k d th t f t l

Please do not pull the wire lead.

●

Pulling the wire lead may damage the connected

component and the scanner may run out of control.

Caution

Please do notapply excessive force to the output shaft.

●When attaching a mirror to the output shaft

, please be

careful not to apply excessive force to the output shaft.

●Accuracy cannot be guaranteed if the output shaft

collapses

due to applying excessive force.

Caution

Please do not apply a voltage to the scanner exce

eding

specifications.

●

Applying an abnormal voltage or faulty wiring may cause the scanner

to burnout or malfunction.

Please do not change wiring while still plugged in.

●

Please ensure that the power is off before removing

wiring and disconnecting plug. There is a

risk of shock

and running out of control.

Caution

Please do not conduct withstand voltage tests.

●Please do not conduct mega or withstand voltage tests.

Doing so

may damage the control circuits of the driver.

Please do not apply a voltage to the driver

exceeding specifications.

● Applying an abnormal voltage or faulty wiring may cause

the driver to burnout or malfunction.

Caution

Please do not touch the circuits inside the

equipment while plugged in. Electric shock

may occur.

Please do not touch the attached heat sink

while plugged in or

within five minutes after disconnecting the power.

●There is a risk of burns as the heat sink becomes hot.

Caution

LSA-10A-30-D-130 Technical Document

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Table of Contents

Chapter 1 Overview of LSA Series .........................................................................................................................4

1-1 Main Characteristics.....................................................................................................................4

1-2 Example of Equipment Configuration ...........................................................................................4

1-3 Scanner System LSA Series Model..............................................................................................5

1-4 Scanner Model.............................................................................................................................5

1-5 Driver Model.................................................................................................................................5

Chapter 2 System Specifications ...........................................................................................................................6

2-1 System Configuration...................................................................................................................6

2-2 Main Specifications.......................................................................................................................7

2-3 Response Characteristics.............................................................................................................7

2-3-1 Response during Rectangular Wave Drive...............................................................................................8

2-3-2 Triangular Wave Drive Response .............................................................................................................9

2-3-2 Triangular Wave Drive Response ...........................................................................................................10

2-4 Optical Scanner Operating conditions Form ...............................................................................13

2-4-1 Supplementary Explanation of Optical Scanner Operating conditions Form..........................................14

Chapter 3 Scanner Specifications........................................................................................................................15

3-1 Main Specifications.....................................................................................................................15

3-2 Connector Specifications............................................................................................................15

3-3 Dimensions (Third Angle Method)...............................................................................................16

3-4 Environment Specifications ........................................................................................................16

3-5 Output Shaft Precision................................................................................................................17

3-6 Stopper Mechanism....................................................................................................................17

3-7 Caution Regarding Scanner Equipment......................................................................................17

3-7-1 Structure of Output Shaft.........................................................................................................................17

3-7-2 Scanner Cable ........................................................................................................................................17

3-7-3 Caution When Attaching Scanner and Load Equipment.........................................................................18

Chapter 4 Driver Specifications............................................................................................................................19

4-1 Main Specifications.....................................................................................................................19

4-2 Protection Functions...................................................................................................................19

4-3 Dimensions (Third Angle Method)...............................................................................................20

4-4 Environment Specifications ........................................................................................................20

4-5 Connector Specifications............................................................................................................21

4-5-1 Input Power Source Connector (CN1) ....................................................................................................21

4-5-2 Scanner Connector (CN2).......................................................................................................................21

4-5-3 Input/Output Signal Connector (CN3).....................................................................................................21

4-6 Input/Output Interface Specifications..........................................................................................22

4-6-1 Positioning Command Signal Input [SIG IN(+)/SIG IN(-)].......................................................................22

4-6-2 Enable Input (ENABLE) ..........................................................................................................................23

4-6-3 Positioning Command Signal Monitor Output (IN-MON)........................................................................24

4-6-4 Positioning Sensor Signal Monitor Output (POS-OUT)..........................................................................24

4-6-5 Positioning Error Signal Monitor Output (POS-ERR)..............................................................................24

4-6-6 Alarm Output (ALM)................................................................................................................................25

4-7 Trimmer Function and Adjustable Range....................................................................................26

4-8 Status Display.............................................................................................................................27

4-9 The Check Pin on the Board.......................................................................................................27

4-10 Power Source Connection........................................................................................................28

4-10-1 Measures to Avoid Voltage Drop in Power............................................................................................28

4-10-2 Selection of Power Capacity.................................................................................................................28

4-10-3 Caution When Connecting Power Source ............................................................................................28

4-11 Caution Regarding Driver Installation........................................................................................29

4-12 Driver Accessories....................................................................................................................30

4-13 Driver Labels and Descriptions.................................................................................................30

Chapter 5 Options..................................................................................................................................................31

5-1 Extension cable..........................................................................................................................31

Chapter 6 Packaging..............................................................................................................................................31

Chapter 7 Warranty................................................................................................................................................32

7-1 Warranty Period..........................................................................................................................32

7-2 Warranty Terms..........................................................................................................................32

LSA-10A-30-D-130 Technical Document

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Chapter 1 Overview of LSA Series

The LSA and PSM series are Galvanometer Scanner systems that can optically scan with quick response

and high accuracy. Main characteristics of the systems based on compact motor technology and

independently developed optical sensor technology, so the following applications are available:

measurement devices, laser processing equipment, laser displays, shutters, laser markers, etc.

1-1 Main Characteristics

♦Quick Response and High Torque/Inertia Ratio

The motor component of the scanner is a moving magnet system and the stator utilizes a core and coil

configuration. This allows for a heavy load/quick response. The LSA and PSM devices are available

for a wide torque range applications.

♦Low Heat Generation (Low Drift)

The temperature rise caused by the quick-response/high-frequency scanner operation is minimal and

results in low drift.

♦High Accuracy/Environmentally Strong Scanner

The sensor component of the scanner can position with high accuracy (system positioning repeatability:

within ± 5μrad [1”]) as it utilizes an optical potentiometer independently developed by our company.

In addition, this sensor is strong against external electrical noise (increased S/N ratio) and is not affected

by the exterior atmospheric environment.

♦Adjustable Functions with Broad Ranging Applications

The driver maximizes the capacity of the combined scanner and possesses numerous adjustment

functions to adjust to customers’ usage conditions.

In addition, we will adjust the drive if necessary based on the study of customer’s operating conditions and

specifications.

1-2 Example of Equipment Configuration

Reference Example: Summary of Laser Marker System

Axis Driver

X Axis Driver

Y Axis LSA

X Axis LSA

* Laser Oscillator

*DC Power Source

* f θ Lens

* Target workpiece

The items marked with “*” should

be prepared by the client

* Miror

*External analogue

command signal

LSA-10A-30-D-130 Technical Document

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1-3 Scanner System LSA Series Model

The model name and symbols of the Galvanometer Scanner System are as follows.

1-4 Scanner Model

The model name and symbols of the LSA Series Galvanometer Scanner are as follows.

1-5 Driver Model

The LSA Series Galvanometer Scanner is combined with the PSM series driver.

The model name and symbols of the PSM series driver are as follows.

LSA - 10 A - 30 -

□□

Model: Galvanometer Scanner System

LSA Series

Maximum Torque

10: 0.1 Nm

Version Symbol

Maximum Swing Angle

30: ±15° (mechanical angle)

Specification Symbol

No Symbol: Standard Specification Product

SP: Special Specification Product

PSM – 1 30 -

□□

Model: Optical Scanner Driver

PSM Series

Version Symbol

Specification Symbol

No Symbol: Standard Specification Product

SP: Special Specification Product

Analogue Command Type

LSA-10A-30 - D - 130 -

□□

Scanner Model

System Notation

Combined Driver Model

Specification Symbol

No Symbol: Standard Specification

Product

SP: Special Specification Product

LSA-10A-30-D-130 Technical Document

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Chapter 2 System Specifications

The specifications of the LSA-10A-30-D-130 scanner system are as follows. The angles within these

specifications are all “mechanical angles”, unless specified otherwise.

2-1 System Configuration

The product configuration of the LSA-10A-30-D-130 is as follows.

Product Configuration Model Units Remarks

Scanner LSA-10A-30 1

Driver PSM-130 1 With accessories.

Load Device －1 Load device for adjustment

Our Galvanometer Scanner System can provide maximum response performance as it can be

appropriately adjusted for our customer’s actual load device (such as mirror, etc.) and operating conditions.

Our drivers are adjusted with the combination of scanner : driver (including adjustment specifications) :

load device=1 : 1 : 1. Please utilize properly adjusted combinations.

Please refer to “Driver Labels and Seal Details” (4-13) to distinguish properly adjusted combinations.

♦Caution when Using Driver

The driver needs to be adjusted for the actual load device attaching to the scanner (mirror, etc.) or for an

artificial load device identical to the actual load device. The customer is responsible for preparing the load

device.

Although we can evaluate and provide data for our load device for testing during the advanced testing

stage, during the product shipment stage, the customer will be responsible for supplying the actual load

device. They will be shipped after adjustment with the actual load device.

If the load device conditions (shape, moment of inertia, material, etc.) are changed, the adjustments of the

driver’s internal constant needs to be changed. In this case, please provide us with details of any

changes.

We will review the adjustment specifications. (There will be a charge for any adjustments after the

product has been shipped.)

If there are big changes to the fixed adjustment conditions (even when there is no load on the drive) of the

load device or the drive command, the scanner may oscillate unexpectedly.In this case, refer to the Over

Position Alarm Output (4-4-6) and configure the sequence to turn off “Enable”.

If the scanner oscillates unexpectedly, the driver resistance may

generate abnormal amounts of heat and start to smoke. In this case,

immediately cut the power source.

Caution

LSA-10A-30-D-130 Technical Document

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2-2 Main Specifications

No. Items Specifications

Repeatability of Positioning

[μrad]

±5

Testing Conditions

Positioning seven times from arbitrary forward and backward positions respectively, and

take the maximum deviation. Divide this by half and place a ± sign.

Utilize an auto-collimator and measure in a room temperature environment.

Waiting Time (including positioning time): within tens of seconds

2 Temperature

Drift

Offset Drift

[μrad / °C]

Scale Drift

[% / °C]

0.01

3 Response Characteristics

Response characteristics based on the customer’s

operating conditions will be confirmed on actual equipment

during the advanced testing stage, as deemed necessary.

The results will be presented as adjustment specifications*2

Representative characteristics are listed in Response

Characteristics (2-3).

*1 Repeatability of Positioning refers to a value at a certain temperature and a short period of time,

excluding drift.

*2 The selections of the applicable models may change in accordance with the customer’s operating

conditions. Therefore, please fill-in the “Optical Scanner Drive Form” (2-4) and contact

our company before manufacturing the load devices or mounting parts.

2-3 Response Characteristics

By specifying the operating conditions and adjusting appropriately the driver according to the conditions,

the scanner system can provide an optimal performance for the focused characteristics. Therefore, the

response characteristics are different for adjustments emphasizing on accuracy and adjustments

emphasizing on response. In addition, if different conditions from adjusted operating conditions are

utilized, the operation of the drive may become unstable.

Our scanner system is appropriately adjusted to the customer’s operating conditions and is fundamentally

provided as a system. The explanation of the response characteristics of the rectangular and triangular

wave drives are on the following pages Using this as reference, please fill out the your usage conditions

in the “Optical Scanner Drive Form” (2-4) and submit this document to an agent or to our sales

representative.

LSA-10A-30-D-130 Technical Document

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2-3-1 Response during Rectangular Wave Drive

The responses of the rectangular or trapezoid wave operations are important for utilizing the positioning

operation. Generally, the trapezoid wave drive settles easier and is better for applications of fluctuating

amplitudes, than the rectangular wave drive.

Rectangular wave drive is showed as an example as follows, and the conditions need to be considered are

discussed.

♦Rectangular Wave Drive Step Response Characteristic (example observed by oscilloscope)

[1] Emphasized Adjustment Amplitude (Unit: [°])

This indicates the optimally adjusted amplitudes during adjustment. Generally, the amplitudes with the

most often used frequency are taken as the emphasized adjustment amplitudes. In case of large

amplitude operation, the command waves of step inputs (stacking small amplitudes) or trapezoid wave

inputs, etc. are utilized

・Response and stability are well balanced and optimal when the actual drive amplitude is equal to the

adjustment amplitude.

・The gain can be raised and the Settling Time decreases as the size of the emphasized adjustment

amplitude decreases.

・If the amplitudes are not constant, the largest amplitude has to be the emphasized adjustment

amplitude.

・If a command with an amplitude larger than the emphasized adjustment amplitude is input, longer time

is necessary for setting after reaching the command position. On the other hand, when a command with

an amplitude smaller than the emphasized adjustment amplitude is input, the setting time will be

identical to the setting time when the emphasized adjustment amplitude is input.

[2] Convergence Criteria (Unit: [°] or [arc-sec])

This indicates the width of the allowable positioning error that is for setting judgment for the commanded

position. Generally, necessary and sufficient conditions of positioning accuracy are considered as

convergence criteria. The device is adjusted to the shortest Settling Time as conditions are satisfied.

・For quick-response operation, the convergence criteria are set broadly and the gain is adjusted high.

Although response increases, longer time is necessary till the device matches the commanded

position.

・During accurate positioning operation, the convergence criteria are set narrowly and the gain is

adjusted low. Although response decreases, the device matches the commanded position in a short

amount of time.

・If the Settling Time is the same, the convergence criteria can be narrowed as the size of the

Positioning Command Signal

Positioning Sensor Signal

Positioning Error Signal

[2] Convergence Criteria

[3] Settling Time

Time

Position

[1] Emphasized Adjustment

Amplitude

LSA-10A-30-D-130 Technical Document

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emphasized adjustment amplitude decreases.

[3] Settling Time (Unit: [ms] or [μs])

A completion of positioning is judged by the positioning error signal that is within the range of the

convergence criteria. The Settling Time is the time from a command input to a completion of positioning

Generally, adjustments are made ensuring the shortest Settling Time being satisfied within the other

operating conditions .

[4] Drive Frequency (Unit: [Hz])

This indicates the actual drive frequency.

Please refer to “Supplementary Explanation of Optical Scanner Operating conditions Form” (2-4-1) for other

features.

♦Rectangular Wave Drive Response Characteristics (Settling Time for amplitudes with load moment of

inertia as the parameter)

0.0

0.5

1.0

1.5

2.0

2.5

3.0

3.5

4.0

4.5

5.0

0.01 0.1 1 10

振幅 [°]

整定時間 [ms]

=3.5 g-cm2

2.2

1.0

Load (JL): Mirror for Our Test Equipment (1.0g-cm2,2.2g-cm2,3.5g-cm2)

Convergence Criteria: 0.005° (amplitude less than 0.5° )/0.01° (amplitude higher

than 0.51° )

Power Source Capacity: ±24V, 240W

Amplitude [°]

Settling Time [ms]

LSA-10A-30-D-130 Technical Document

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2-3-2 Triangular Wave Drive Response

Dynamic characteristics of keeping positioning error within the definite range are important for scanning

operations. In the operations, the response characteristics of the saw-tooth wave drive or the triangular

wave drive are important. It is necessary to adjust the conditions during the steep section of saw-tooth

wave drive.

Here, the triangular wave drive is shown as a typical example, indicating conditions that need to be

examined.

♦Triangular Wave Drive Perspective of Response Characteristics (observed by oscilloscope)

[5] Emphasized Adjustment Amplitude (Unit: [°])

This indicates the optimally adjusted amplitudes during adjustment.

・Response and stability are well balanced and optimal when the actual amplitude is equal to the

adjustment amplitude.

・The gain can be raised and the range of the constant speed is increased as the size of the emphasized

adjustment amplitude decreases.

・If the amplitudes are not constant, the largest amplitude has to be the emphasized adjustment

amplitude.

[6] Convergence criteria (Unit: [°] or [arc-sec])

[5] Emphasized Adjustment

Amplitude

Positioning Command Signal

Positioning Sensor Signal

Position

Positioning Error Signal

Time

[6] Convergence

Criteria

[7] Constant Speed Interval

Command Interval

Time

Position

[8] Position Delay

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