EBARA A70W Manual de usuario
Doc. No. 7313-L4602B Rev. 3B
INSTRUCTION MANUAL
MULTI-STAGE DRY VACUUM PUMP
A70W (A70W-S, A70W-C)
A30W (A30W-S, A30W-C)
A25S (A25S-S)
A10S (A10S-S)
A07V (A07V-S)
Distribute this Instruction Manual to all end user
personnel operating the equipment.
ISSUED BY PRECISION MACHINERY GROUP
Do not reproduce or reprint any portion of this manual without permission.
Manufacturer reserves the right to discontinue or change any specifications or designs
without notice and without incurring obligations.
All rights reserved, copyright EBARA Corporation.
(i)
Record of Changes
Rev. Date Page Position Contents Reason
0 2-Jun-94 Newly issued
1 13-Jul-94 5
6-10
14
17
21
22
A07V Spec.
Outline Drawing
Fig. 3.4
Fig. 4.2
Fig. 4.6
Table 4.5
Pumping Speed
Water Sup./Rtn
Sys. Flow
Coupler
Ctrl. Wiring
Pin Assign.
Correction
Add NPT
Add Note
Add Drawing
Correction
Add note
2 14-Nov-96
ⅲ,ⅳ
ⅴ,ⅵ,ⅶ
4
21
25
26
33
35,36
37
44,45
Fig. 1,2,3,4,5
Drawing
3.3 List
Dig. 4.4
Table 4.6
Fig. 4.7
Table 6.1
6.3
7 (8)
9
Safety warning
labels
Warning label
Location
Detailed
specifications
Power Sup. Rec
Dipswitch
S.W setting
Typical check
items
Spare Parts
Pump Lifting
Service Net.
Add
Add
Add List
Correction
Design Change
Design Change
Add Table
Add List
Add Note
Add List
A 12-Dec-97 New release
per ECO 2905
3 20-May-99 21
44,45
5,6,18,
27,28,
32
Tab. 4.2
9. Service Network
-----
Suitable wire
Japan, Taiwan
(Add., Phone, Fax)
The Unit was
changed in terms
of Domestic
regulation for
Measurement low.
Correction
Change
-----
3A 27-Apr-01 ETI release of
EC Rev 3 per
ECO 5394.
3B June 2002 20
iv
Thruout
Add UL grounding
note
Add LCD “hot
surface” note
Add appendices
Language Edit
Third-party
marking
Third-party
marking
SEMI S2
ECO 5771
EBARA Corporation
(ii)
Safety Information
Anyone operating this pump must have the knowledge to identify and avoid hazardous
conditions associated with the pump.
Rash actions or improper operation may cause dangerous accidents and serious injuries.
Before installation and operation, the operator first should have a thorough knowledge of the
pump’s construction, operating procedures, and hazards.
The operator should read this instruction manual and other documents issued by EBARA.
If you have any questions on pump operation, safety, or maintenance, please do not hesitate
to contact EBARA directly.
Three terms in this manual designate different levels of hazard:
DANGER indicates an imminently hazardous situation that, if not avoided, will
result in death or serious injury.
WARNING indicates a potentially hazardous situation that, if not avoided, could
result in death or serious injury.
CAUTION indicates an imminently hazardous situation that, if not avoided, may
result in minor or moderate injury.
This term may also indicate situations that might damage
equipment.
EBARA Corporation
(iii)
Important Precautions
DANGER Keep out from under the pump when it is elevated.
Only qualified personnel should unload and lift the pump.
WARNING Be careful not to overturn the pump when pushing or pulling it
sideways. The pump is narrow in comparison to its height.
WARNING Only a qualified electrician, observing all national and local
regulations, should perform electrical work.
WARNING Cut and lock out electrical power before beginning wiring or
maintenance work.
Do not switch on the power supply to the pump until work is
completed and pump and piping are back in safe operating
condition.
WARNING Supply N2gas to the exhaust piping when necessary to dilute
flammable or toxic gases down to a safe concentration.
WARNING Purge system with sufficient N2gas before removing and cleaning
the vacuum lines and exhaust piping.
Prevent dispersal of flammable, toxic or dangerous materials and
guard against their contact with the human body.
Work only in locations with an emergency escape route.
WARNING Do not convert the pump from one process to another without an
intervening overhaul. Gases or reaction products remaining in
the pump may react and lead to accidents or to the formation of
large amounts of byproduct.
WARNING Check Safety Interlock functions periodically (every 6 months) to
confirm correct operation. See Appendix 2 for a description of
these interlocks.
WARNING Connect exhaust from pumps handling process gases to an
appropriate exhaust abatement system that is equipped with
discharge quality monitors to provide warnings and to shut down
the process gas flow if concentrations exceed allowable limits.
WARNING Check for gas leaks after initial installation of the piping and after
reassembly following maintenance or, at least, annually. Gas
leaks can result in the discharge of harmful and dangerous
substances and in abnormal reactions due to the admission of air
into the pump. Replace o-rings as required to correct leaks.
See Appendix 4.
WARNING Do not modify the pump or any of its parts without EBARA's
approval.
EBARA Corporation
(iv)
WARNING Do not place the LCD controller on or near a surface with a
temperature exceeding 65ºC.
WARNING The pump casing and exhaust piping become extremely hot
during operation and remain hot for some time after stopping.
Keep pump and exhaust piping away from contact with personnel
and flammable substances.
Do not remove pump enclosure panels during operation.
CAUTION Disposal of process byproducts must be in strict accord with all
local and national environmental and safety regulations.
CAUTION Dispose of printed circuit boards containing lithium batteries in
strict accord with all applicable local and national environmental
regulations.
CAUTION The height of EBARA dry pumps may place the EMO button and
the LCD controller below the heights recommended in SEMI
S8-95. See Appendix 3.
The following safety warning labels appear on the pump covers:
High temperature warning
Hazardous voltage warning
Hazardous materials warning
Electric charge mark
Hazardous weight danger
High temperature warning
Hot surface may burn or cause injury.
Allow the piping and casing to cool before servicing.
EBARA Corporation
(v)
Hazardous voltage warning
Hazardous Voltage may shock, burn, or cause death.
Turn power off and lockout before servicing.
Hazardous materials warning
(Applies only when pumping hazardous materials)
Run the pump only with N2gas purge before servicing.
Take adequate measures against dangerous reaction and contact with human body.
Electric charge mark
EBARA Corporation
(vi)
Hazardous weight danger
Heavy weight may cause severe injury or death due to overturning or falling pump.
Keep out from under the lifted pump.
Raise all adjuster feet fully when moving.
EBARA Corporation
(vii)
EBARA Corporation
(viii)
EBARA Corporation
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