DISCO DAD321 Manual de usuario
2006-08
MAINTENANCE MANUAL
Automatic Dicing/Cutting Saws
DAD321
DAC351
DAD361
SOFTWARE VERSION 5.4 SERIES
UHESME*054C
Copyright of this document is owned by Disco Corporation ("Disco").
No part of this document may be copied or reproduced in any form
or by any means, without the express written permission of Disco.
Also, this document may not be disclosed or transferred to third
parties.
This document is printed on recyclable Lint-Free paper.
- The blue paper is recyclable as used paper just like plain paper.
- The cover paper and adhesive portions are non-recyclable.
(Remove the cover and adhesive portions before recycling.
Recycle the blue paper only.)
Sample
READ CAREFULLY BEFORE USING THIS
MANUAL
Introduction
This machine is a dicing saw for cutting silicon wafers and glass circuit boards
(workpieces, hereafter).
It has the rotary sections which rotate at high speed, the high-voltage sections
which may cause electric shock hazards and the drive sections which may
catch the operator's body and clothing.
If the machine is not properly operated, safety hazards may cause serious
injury or death.
Read before using the machine
Before using the machine, thoroughly read this manual and follow the
instructions set forth in this manual.
To assure safety in the operation and maintenance of the machine, it is
important that you know the location of potential safety hazards. It is difficult
for DISCO to foresee each and every potential safety hazard. However, this
manual carries various precautionary notes and warnings to indicate the
presence of all foreseeable potential safety hazards. For increased safety
assurance, it is therefore essential that you observe all the precautions and
other relevant instructions set forth in this manual.
If you modify the machine without prior consent of DISCO or repair it in a
manner not stated in this manual, the safety assurance features of the machine
may be seriously affected.
Never attempt to modify or repair the machine in a manner not approved by
DISCO.
Sample
Hazard level
The safety precautions set forth in this document are classified into DANGER,
WARNING and CAUTION categories which represent three degree of hazards
latent in the machine. These categories are defined as detailed below in
accordance with the seriousness and probability level of the hazard. In addition
to the above three safety precaution levels, CAUTION without the safety alert
symbol ( ) and NOTICE are used to give safety usage instructions to the
user.
Before using the machine, be sure to read and understand all the associated
safety precautions set forth in the manual.
Hazard levels are classified as follows:
DANGER
If you cannot avoid the incident in question, a critical
situation in which either critical injury or death is very
likely to result.
This symbol is used for the incident in which the injury
is critical and there is high probability of occurrence.
WARNING
If you cannot avoid the incident in question, a serious
situation in which either critical injury or death may
result.
This symbol is used for the incident in which the injury
is serious but there is not high probability of occurrence.
CAUTION
If you cannot avoid the incident in question, a medium
or slight injury may result.
This symbol is used for the incident in which the injury
is slight and there is not high probability of occurrence.
CAUTION
If you cannot avoid the incident in question, an accident
of physical damage may be caused.
NOTICE
Indicates the safe way of using the machine as well as
precautions to avoid accidents resulting damage to
property.
Sample
Safety label
Safety labels are affixed to the hazardous sections of the machine. Before
using the machine, verify the label positions and thoroughly understand the
precautions and warning indicated by the safety labels.
Label Hazard Level Meaning of Label
Rotary Blade
Label
WARNING
WARNING
It is possible that your hands and
fingers may be cut by the rotating
blade.
Observe the following precautions
for at least 15 seconds until the
spindle comes to a complete stop:
- Do not place your hands or fingers
near the blade or flange.
- Ensure that the splash cover is
kept closed.
Driving Section
Label
CAUTION
CAUTION
It is possible that yours hands and
fingers may be caught and injured
by the driving section.
While the power is ON, ensure that
the cover is kept closed.
Electrical Shock
Hazard Label
WARNING
Use care to avoid possible electrical
shock hazard.
General Label
WARNING
General caution/warning/danger
label.
Sample
Intro-1
INTRODUCTION
About this manual
This Maintenance Manual explains the maintenance and inspection items and
data setup checkout that are necessary for customer-side maintenance of
Automatic Dicing/Cutting Saws 3*1 Series Models DAD321, DAC351 and
DAD361. This manual is written for the maintenance personnel.
To ensure safety
To ensure safety, be sure to thoroughly read and understand the contents of this
manual before performing maintenance or adjustment. Note that this manual is
based on the software versions of 5.4 series.
When installing or adjusting the machine, be sure to follow the procedures set
forth in this manual.
Be sure that the maintenance should be done by a qualified person who has
completed DISCO's education curriculum (hereinafter referred to as the
maintenance personnel).
Definition of a manager and an operator
This manual defines a manager and an operator as follows:
Category Applicable
personnel Job
Manager Management
representative The person who is responsible for overall
management of machines and operators.
Maintenance
personnel The qualified person who received DISCO
machine maintenance training.
Operator Data maintenance
personnel The qualified person who is responsible
for management of software data of the
machine.
Operator The person who operates the machine to
process workpieces.
Minimum retention period of the maintenance functional parts
Maintenance functional parts required for repair or modification will be
retained by Disco for at least seven years after the B/L date.
Sample
Intro-2
Part replacement
When replacing parts, be sure to use the genuine DISCO brand. If any parts
other than DISCO's genuine parts are used, DISCO shall assume no liability
for any damage of any kind.
When replacing components using the UL-listed parts, be sure to use the UL-
listed parts to be installed.
When replacing any critical parts, consult your nearest DISCO office. If any
critical parts are replaced without consulting DISCO, DISCO shall assume no
liability for any consequences arising therefrom.
Part warranty period
Part warranty period is as follows:
Part Warranty period
Electrical parts having contact points Six months from the B/L date
Consumable parts Not covered
Parts other than the above 12 months from the B/L date
Documentation for this machine
The following five written manuals are provided for this machine.
This manual is the Maintenance Manual indicated by the arrow.
Manual Who should read Contents
Installation Manual Maintenance
personnel Operational procedures for
machine installation and
adjustment
Operation Manual Operator Operational procedures to be
performed by operators
Data Maintenance
Manual Data maintenance
personnel Screen contents for data entry and
data entry procedures
Maintenance
Manual Maintenance
personnel Servicing, inspection and
adjustment procedures to be
performed by customers
Technical
Reference Maintenance
personnel Machine specifications,
circuit diagrams, illustrations and
part lists
Unit notation
International System of Unit is adopted to express any unit. The values in the
parenthesis are reference data. Also, all the pressure values are expressed in
gauge pressure.
Sample
Intro-3
Notation of part number
In this document, the part numbers are shown as follows.
New style part no. Former style part no.
XXXX-XXXXXX-X (YYYYYYYY--Y)
Sample
Intro-4
Section diagram
The diagram and table below show the names and functions of each section.
Operation control
section
Cutting section
Name Function
Cutting Section Cuts workpieces.
Operation Control
Section Keys on the operation panel are used for data entries,
and the function keys perform operations.
Also, the monitor displays operation-related
information and microscope images in accordance
with operation panel manipulation.
Sample
Intro-5
External view
The diagram and the table below show the external view, names and functions
of main constituents.
Operation panel
Splash cover
Vacuum gauge
Flowmeter
Disk drive
Pilot lamp Monitor
Ke
y
switch
POWER lam
p
Maintenance switch
Light intensity
adjustment dial
EMO switch
Chuck table
Microscope
Name Function
Operation Panel Consists of operation control keys.
Splash Cover Prevents water from splashing around during spindle
rotation and functions as a safety device.
Vacuum Gauge Indicates the chuck table vacuum pressure to attract
the workpiece to the chuck table.
Flowmeter Indicates the flow rate of the wheel coolant water.
Disk Drive Functions as an external storage device.
[Optional accessory]
Pilot lamp Indicates the machine operating status with the green
and yellow lamps. If an error occurs, the red lamp
flashes on and off.
Monitor Displays operating information and microscope
images.
POWER Lamp Lights while the power is ON.
Key Switch Used to turn ON and OFF the machine by inserting
and rotating the key.
Maintenance Switch Used by the maintenance personnel.
Light Intensity
Adjustment Dial Adjusts the microscope image light intensity.
EMO Switch Functions as the emergency stop switch. When
pressed, shuts off the electrical power supply.
Microscope Used to view workpieces for alignment and other
purposes.
Chuck Table Used to mount workpieces on it.
Sample
Intro-6
Axis arrangement diagram
The diagram and the table below show axis arrangement, names and functions
of each axis.
X-axis
θ-axis
(except 351)
Spindle axis
Z-axis
Y-axis
Main body frame
Front
Name Function
X-axis Moves the chuck table to the right and the left.
Y-axis Moves the spindle axis and the microscope forward
and backward.
Z-axis Moves the spindle up and down.
θ-axis Rotates the chuck table.
Spindle-axis Rotates a blade at a high speed.
Main Body Frame Supports the machine main body.
Sample
Otros manuales para DAD321
1
Este manual sirve para los siguientes modelos
2
Tabla de contenidos
Otros manuales de Sierra de DISCO
