CyberOptics WaferSense Manual de usuario
CyberOptics
Semiconductor
WaferSense™
ATS User’s
Guide
ii
General
Information
WaferSense Teaching Wafer and Link
Changes or modifications not expressly approved by CyberOptics Semiconductor, Inc., may
void your authority to operate the WaferSense ATS.
The radio contained in the WaferSense ATS meets all the applicable FCC requirements for RF
Safety. While in operation, the FCC requires users and nearby persons to maintain a minimum
separation distance of 20 cm (8 inches) or farther from the WaferSense ATS.
The WaferSense Teaching Wafer and Link have been tested and found to comply with the
limits for a Class B digital device, pursuant to Part 15 of the FCC Rules. These limits are
designed to provide reasonable protection against harmful interference in a residential
installation. This equipment generates, uses and can radiate radio frequency energy and, if not
installed and used in accordance with the instructions, may cause harmful interference to radio
communications. However, there is no guarantee that interference will not occur in a particular
installation. If this equipment does cause harmful interference to radio or television reception,
which can be determined by turning the equipment off and on, the user is encouraged to try to
correct the interference by one or more of the following measures:
• Reorient or relocate the receiving antenna.
• Increase the separation between the equipment and receiver.
• Connect the equipment into an outlet on a circuit different from that to which the
receiver is connected.
• Consult the dealer or an experienced radio/TV technician for help.
This device complies with part 15 of the FCC Rules. Operation is subject to the following two conditions: (1)
This device may not cause harmful interference, and (2) this device must accept any interference received, including
interference that may cause undesired operation.
This ISM device complies with Canadian ICES-001.
Cet appareil ISM est conforme à la norme NMB-001 du Canada.
iii
WaferSense Technical Support
Technical support is available from CyberOptics Semiconductor Monday through Friday,
8:00 A.M. to 5:00 P.M. Pacific Time.
WaferSense, TeachView, and TeachTarget are trademarks of CyberOptics Semiconductor, Inc.
Third-party brands and names are the property of their respective owners.
Copyright © 2006 - 2007, CyberOptics Semiconductor, Inc. All rights reserved.
CyberOptics Semiconductor, Inc.
13555 S.W. Millikan Way
Beaverton, OR 97005
P/N 920-0503-01
E-mail: [email protected]
Phone: (503) 495-2200
800-366-9131 (US and Canada only)
Fax: (503) 495-2201
iv
Table of
Contents
General Information ......................................................ii
Chapter 1
Introduction....................................................................................1.1
Chapter 2
Installing Your ATS....................................................................... 2.1
Installing the Software....................................................................2.1
Installing the Wireless Link............................................................2.3
Checking Communications Between the Link and the Wafer ......2.5
Registering Your Teaching Wafer for Calibration Service.............2.6
Running the TeachView Application.............................................2.7
Technical Support ..........................................................................2.9
Chapter 3
Using Your ATS............................................................................. 3.1
Using the ATS Teaching Wafer Buttons and Status Lights ..........3.2
Finding a Target.............................................................................3.3
Using the Target Overlay ...............................................................3.8
Using Find Once and Continuous Find.........................................3.9
Taking a Single Reading...........................................................................3.9
Taking Continuous Readings..................................................................3.9
Setting the Target Criteria............................................................ 3.10
Logging Your Readings ...............................................................3.12
Logging a Reading..................................................................................3.13
Including User-Specified Information in the Log File .....................3.14
Changing the Log File............................................................................3.15
Displaying Readings from a Log File ..................................................3.15
Printing the TeachView Window ................................................. 3.15
Monitoring the Operating Temperature ...................................... 3.16
Table of Contents
v
Using the Rechargeable Battery................................................... 3.17
Monitoring the Battery Level................................................................3.17
Charging the Battery ..............................................................................3.17
Monitoring the Wireless Connection to the Teaching Wafer ...... 3.18
Changing the Pairing Between the Teaching Wafer and Link.... 3.19
Saving Your Settings.....................................................................3.20
Loading Settings from a File.................................................................3.20
Chapter 4
Creating Target Configuration Files ............................................. 4.1
Choosing a Target ..........................................................................4.1
Measuring the Target .....................................................................4.2
Running TeachTarget ....................................................................4.2
Chapter 5
Maintaining Your ATS .................................................................. 5.1
Annual Factory Calibration and Battery Replacement ..................5.2
Battery Use and Disposal ...............................................................5.2
Updating Your ATS Wafer Firmware.............................................5.3
Chapter 6
Specifications................................................................................. 6.1
System Requirements .....................................................................6.1
ATS Hardware ................................................................................6.1
Environmental ..........................................................................................6.1
Power..........................................................................................................6.1
Range and Accuracy.................................................................................6.1
Index.....................................................................Index.1
vi
List of
Illustrations
Chapter 2
Figure 2.1: The InstallShield Wizard.......................................................2.2
Figure 2.2: Found New Hardware Wizard..............................................2.3
Figure 2.3: Installing the WaferLink Device...........................................2.4
Figure 2.4: Starting the TeachView Application.....................................2.7
Figure 2.5: Calibration Registration Dialog............................................2.8
Figure 2.6: The About TeachView Dialog ..............................................2.9
Figure 2.7: The About your ATS Wafer Dialog.......................................2.9
Chapter 3
Figure 3.1: The TeachView Application .................................................3.3
Figure 3.2: Aligning the Teaching Wafer................................................3.4
Figure 3.3: Target Configuration List .....................................................3.5
Figure 3.4: Numeric Readouts................................................................3.5
Figure 3.5: Target Centered in the Sight Ring........................................3.7
Figure 3.6: Target Overlay ......................................................................3.8
Figure 3.7: Set Target Criteria Dialog................................................... 3.11
Figure 3.8: Logging a Reading ............................................................. 3.13
Figure 3.9: Set Station Information Dialog ........................................... 3.14
Figure 3.10: Temperature Monitoring Gauge ....................................... 3.16
Figure 3.11: Battery Monitor.................................................................. 3.17
Figure 3.12: Wireless Connection Monitor............................................ 3.19
Chapter 4
Figure 4.1: Aligning the Teaching Wafer ................................................4.2
Figure 4.2: Step 1. Position the Wafer .....................................................4.3
Figure 4.3: Step 2. Optimize Lighting.....................................................4.4
Figure 4.4: Step 3. Acquiring Image .......................................................4.5
Figure 4.5: Step 4. Secondary Target Parameter.....................................4.6
Figure 4.6: Step 5. Overlay Alignment, Primary Target..........................4.7
Figure 4.7: Step 5. Overlay Alignment, Secondary Target......................4.8
Figure 4.8: Step 6. Generating Target Parameters..................................4.9
1.1
Chapter 1
Introduction
The CyberOptics Semiconductor WaferSense™ Automatic Teaching System (ATS) measures
three-dimensional offsets to teach wafer handoff positions. Using machine vision technology, it
“sees” targets inside semiconductor equipment. The TeachView™ software application makes
it easy to precisely adjust equipment. The large display and wireless link let you place the
computer at a convenient distance from the teaching wafer.
ATS consists of the following components:
•Teaching wafer. The ATS is designed with a wafer-like form factor, so it can fit in
most wafer-handling equipment. The teaching wafer is also vacuum compatible.
•TeachView and TeachTarget™software. The TeachView software application
monitors the teaching wafer and displays X, Y, and Z offsets and other status
information in real time. TeachTarget creates target configuration files needed by
TeachView. Both applications run on most personal computers that use the
Microsoft Windows operating system.
•Wireless link. The software communicates with the teaching wafer by using a
Bluetooth wireless link that attaches to a USB port on a personal computer.
•Charging clean box. The teaching wafer is powered by an internal rechargeable
battery, which you recharge by placing the teaching wafer into the charging clean box.
•Carrying case. The carrying case makes it easy to take your complete ATS system
with you in the plant or on the road.
The following chapter gives you instructions for installing your ATS system.
2.1
Chapter 2
Installing Your ATS
This chapter describes the procedures you need to perform to install your ATS and get it ready
for use. For best results, perform the procedures in the order they are presented in this chapter:
1. Installing the software
2. Installing the wireless link on the USB port
3. Checking communications between the link and the teaching wafer
4. Registering your teaching wafer
5. Running the TeachView application
Installing the Software
To run the WaferSense ATS software, your computer must have the following:
• Windows 2000, Windows XP, or Windows Vista operating system
• One free high-power USB 1.1 or USB 2.0 port
To install the WaferSense ATS software:
1. Log on using an account with Administrator privileges.
Caution
Dropping the teaching wafer or hitting it against a hard object can bend, break, or chip
the housing; damage the internal components; or knock the teaching wafer out of
calibration. While it is not as fragile as an actual silicon wafer, handle the teaching wafer
with care, as you would any precision instrument. If the teaching wafer is damaged or in
need of calibration, see Chapter 5, “Maintaining Your ATS.”
Chapter 2. Installing Your ATS
2.2
2. Insert the WaferSense ATS Installation Disk into the CD drive.
The InstallShield Wizard starts automatically, as shown in Figure 2.1. If the wizard doesn’t
start automatically, use Windows Explorer to view the contents of the CD and double-
click the setup.exe program.
Figure 2.1: The InstallShield Wizard
3. Follow the instructions provided by the wizard to install the software.
4. After you complete the instructions for all of the wizard screens, click Finish. If
Windows notifies you that the drivers have not passed Windows logo testing, just click
Continue Anyway to complete the installation.
By default, the Setup program installs the TeachView and TeachTarget applications in a new
program group called WaferSense ATS. Setup also installs an online copy of this user’s guide,
which is available from the TeachView and TeachTarget Help menus and in the WaferSense
ATS program group in the Windows Start menu.
Tabla de contenidos
Manuales populares de Semiconductor de otras marcas
Philips
Philips AN10369 Instrucciones de instalación y funcionamiento
GigaDevice Semiconductor
GigaDevice Semiconductor AN055 Instrucciones de instalación y funcionamiento
Hotenda
Hotenda MPC8349EA Manual de instrucciones
Fujitsu
Fujitsu F2MC-8FX Series Manual de usuario
NXP Semiconductors
NXP Semiconductors AN10365 Instrucciones de instalación y funcionamiento
Fujitsu
Fujitsu F2MC-16L Series Manual de usuario
