COXEM EM-30PLUS Manual de usuario

Scanning Electron Microscope

EM-30PLUS Operating Manual

COXEM Co., Ltd.

Scanning Electron Microscope EM-30PLUS Operating Manual

Contents

1. Introduction.................................................................................................................. 7

1.1 Descriptions on Product Parts ..................................................................................................7

1.1.1 Main Body of EM-30PLUS ....................................................................................................................... 7

1.1.2 Back and Inside of EM-30PLUS............................................................................................................. 8

1.2 Operational Procedure of Equipment ......................................................................................9

1.3 Cautions before Use..................................................................................................................10

1.3.1 Handling.........................................................................................................................................................10

1.3.2 Permission by Operation........................................................................................................................11

1.3.3 Safety Precautions .....................................................................................................................................12

2. Screen Composition.................................................................................................. 14

2.1 Main Screen of NS.....................................................................................................................14

2.2 Explanations on Buttons ..........................................................................................................15

2.2.1 E-Gun Power Button.................................................................................................................................15

2.2.2 Vacuum State Buttons .............................................................................................................................16

2.2.3 Selection of Detector Mode .................................................................................................................17

2.3 Display Mode..............................................................................................................................18

2.4 Image Mode................................................................................................................................20

2.5 Stage & Holder Information....................................................................................................20

2.5.1 Maximum Tilt Angle .................................................................................................................................21

2.6 Right Function Tap ....................................................................................................................22

2.6.1 Function..........................................................................................................................................................22

2.6.2 Magnification ...............................................................................................................................................23

2.6.3 Image Viewer Setting...............................................................................................................................24

2.7 Top Function Tap........................................................................................................................25

2.7.1 Setup................................................................................................................................................................26

2.7.2 Option .............................................................................................................................................................33

2.7.3 Help..................................................................................................................................................................36

2.8 Image Viewing............................................................................................................................37

2.8.1 Screen for Image Viewing .....................................................................................................................37

2.8.2 Image Tools ..................................................................................................................................................37

2.8.3 Image Correction .......................................................................................................................................38

2.8.4 Image Shift....................................................................................................................................................38

2.9 Other Buttons .............................................................................................................................39

2.9.1 Delete All .......................................................................................................................................................39

Scanning Electron Microscope EM-30PLUS Operating Manual

2.9.2 Wobble ...........................................................................................................................................................39

3. Specimen Preparation .............................................................................................. 40

3.1 Summary .....................................................................................................................................40

3.2 Types of Stub..............................................................................................................................41

3.2.1 Basic Components of Stub ....................................................................................................................41

3.2.2 Directions for Multi Holder ...................................................................................................................42

3.2.3 Stub Cleaning ..............................................................................................................................................43

3.3 Types of Materials .....................................................................................................................44

3.3.1 Classification by Height ..........................................................................................................................44

3.3.2 Classification by Material .......................................................................................................................44

3.4 Production of Specimen ...........................................................................................................46

3.4.1 Checklist before Specimen Preparation ..........................................................................................46

3.4.2 Material Preparation .................................................................................................................................46

3.4.3 Measurement of WD................................................................................................................................48

3.4.4 Specimen Mounting on Stub ...............................................................................................................49

3.5 Specimen Mounting ..................................................................................................................51

3.5.1 Preparation and Mounting of Specimen ........................................................................................51

3.5.2 Specimen Storage......................................................................................................................................53

4Preparation for Taking Photos ............................................................................... 54

4.1 Power ON/OFF............................................................................................................................54

4.1.1 Turning on the Main Body of EM-30PLUS.....................................................................................54

4.1.2 Turning off EM-30PLUS...........................................................................................................................55

4.2 Setting up of Electron Beam ...................................................................................................56

4.2.1 Turning on the Electron Beam.............................................................................................................56

4.2.2 Filament Optimization .............................................................................................................................57

4.3 Location Movement of Specimen...........................................................................................59

4.3.1 Use of Multi Holder..................................................................................................................................59

4.3.2 Use of Stub Except Multi Holder........................................................................................................60

4.3.3 Use of Tilt Function...................................................................................................................................62

4.3.4 Adjustment of Minimum Magnification..........................................................................................64

4.3.5 Specimen Selection and Moving using Mouse ...........................................................................65

4.3.6 Driving Mode...............................................................................................................................................66

5Image Acquisition ..................................................................................................... 69

5.1 Setting Observation Mode.......................................................................................................70

Scanning Electron Microscope EM-30PLUS Operating Manual

5.1.1 RED & Focus Mode ..................................................................................................................................70

5.1.2 Fast Mode......................................................................................................................................................70

5.1.3 Slow Mode....................................................................................................................................................71

5.1.4 Photo Mode .................................................................................................................................................71

5.2 Setting Acceleration Voltage ...................................................................................................72

5.2.1 Summary of Acceleration Voltage .....................................................................................................72

5.2.2 Setting Acceleration Voltage ................................................................................................................76

5.3 Setting Observation Magnification/Spot size ......................................................................78

5.3.1 Methods for Magnification Selection...............................................................................................79

5.3.2 Setting Spot size ........................................................................................................................................80

5.4 Focus Adjustment ......................................................................................................................81

5.4.1 Focus Setting ...............................................................................................................................................83

5.5 Fine Movement of Images .......................................................................................................89

5.5.1 Use of Image Shift ....................................................................................................................................89

5.5.2 Use of Beam Rotation..............................................................................................................................90

5.6 Control of Contrast and Brightness .......................................................................................91

5.6.1 Control of Contrast/Brightness............................................................................................................91

5.7 BSE Mode ....................................................................................................................................92

5.7.1 Precautions for Using BSE Sensor......................................................................................................93

5.7.2 BSE Setting....................................................................................................................................................94

5.7.3 Directions for BSE Mode ........................................................................................................................94

5.8 LV Mode (Low Vacuum Mode) - Optional................................................................................98

6Wobble Operation for Aperture ..........................................................................100

6.1 Structure of Aperture............................................................................................................. 100

6.2 Wobble (Procedure of Aperture Alignment) ..................................................................... 101

6.2.1 Wobble Operation 1.............................................................................................................................. 102

6.2.2 Wobble Operation 2.............................................................................................................................. 106

6.2.3 Methods for Aperture Setting .......................................................................................................... 110

6.2.4 Aperture Alignment (Resetting) ....................................................................................................... 112

7Image Save ...............................................................................................................113

7.1 Management of Image Information ................................................................................... 113

7.2 Use of Image Tools................................................................................................................. 114

7.2.1 Addition of Figures ................................................................................................................................ 114

7.3 Image Save Function .............................................................................................................. 120

7.3.1 Image Save ................................................................................................................................................ 120

Scanning Electron Microscope EM-30PLUS Operating Manual

8Alignment Operation.............................................................................................. 121

8.1 Summary of E-Gun Alignment ............................................................................................. 121

8.2 Method for E-Gun Alignment .............................................................................................. 122

Scanning Electron Microscope EM-30PLUS Operating Manual

Before using the product, please read this manual carefully and understand the

directions. Be sure to keep the manual in a conspicuous place.

Some devices or functions in manual may not be provided and they can be different

depending on optional items or options.

Images on the cover or in the manual are for illustration, which may be different from

actual products.

The functions and performance of this product and manual can be changed without

prior notification.

Scanning Electron Microscope EM-30PLUS Operating Manual

1. Introduction

1.1 Descriptions on Product Parts

It describes the names and functions of the parts of EM-30PLUS.

1.1.1 Main Body of EM-30PLUS

No.

Items

Descriptions

①

E-Gun cover

It is a cover for protecting e-gun.

②

LED Display for vacuum

Its vacuum state is displayed with LED lamp.

③

Pump/Vent button

It cancels or set up the state of vacuum by

force.

④

Chamber door

It is a door for chamber in which a specimen is

placed.

⑤

Variable Aperture

It is a handle used when controlling aperture.

⑥

Power switch

It is used for turning on the power.

①

②

③

④

⑤

⑥

Scanning Electron Microscope EM-30PLUS Operating Manual

1.1.2 Back and Inside of EM-30PLUS

No.

Items

Descriptions

①

Electronic board and

radiator

It is an electronic board and a radiator.

②

Vacuum gage

It measures the vacuum state.

③

Turbo molecular pump

It keeps vacuum state high.

④

HV power tank

It provides the power of high voltage.

⑤

Damper

It absorbs vibrational energy.

⑥

Auto Stage

It moves X axis, Y axis, and T axis Stage.

⑦

Chamber

It is a vacuum chamber in which a specimen is

placed.

⑧

SE Detector

It detects SE.

⑨

Condenser lens

It is a lens condensing electron beam.

⑩

Main vent pipe

It is a vacuum vent pipe.

⑪

E-Gun

It radiates electronic beams.

⑫

BSE Board

It is a BSE electronic board.

①

②

③

④

⑫

⑪

⑩

⑨

⑧

⑦

⑥

⑤

Scanning Electron Microscope EM-30PLUS Operating Manual

1.2 Operational Procedure of Equipment

Operational procedures of EM-30PLUS electron microscope (EM) are as follows.

Stages

Detailed performances

Specimen Preparation

3.2.2 Assembling Method for Stub

3.4.2 Preparation of Materials

3.4.3 Measurement of Specimen Height

3.5.2 Specimen Mounting on Equipment

Power ON

4.1.1 Turning on the Main Body of EM-30PLUS

Preparation for Taking

Photos

4.3.1 Use of Multi Holder

4.3.2 Use of Stub Except Multi Holder

4.3.5 Specimen Selection and Moving Using Mouse

Image acquisition

5.1 Setting up Observation Mode

5.2 Setting Acceleration Voltage

5.3 Setting up Observation Magnification/Spot Size

5.4 Focus Adjustment

5.5 Fine Movement of Image

5.6 Control of Contrast & Brightness

Image save

7. Image Save

Scanning Electron Microscope EM-30PLUS Operating Manual

1.3 Cautions before Use

1.3.1 Handling

If fine dust or debris gets into electron microscope (EM), the equipment performance can

be degraded. Therefore, be sure to handle the equipment with plastic gloves.

Example of Plastic Gloves

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