Ion Coater SPT-20 Operating Manual
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Contents
1. Introduction.................................................................................................................. 4
1.1 Descriptions on Instrument Parts.............................................................................................4
1.1.1 Main Unit of SPT-20................................................................................................................................... 4
1.1.2 View from Back of SPT-20....................................................................................................................... 5
1.2 Cautions before Use ....................................................................................................................6
1.2.1 Precautions on Handling ......................................................................................................................... 6
1.2.2 Permission by Operation.......................................................................................................................... 7
1.2.3 Safety Guidelines.......................................................................................................................................... 8
2. Specification ................................................................................................................. 9
2.1 Rotary vacuum pump.................................................................................................................9
2.2 Ion Coater .....................................................................................................................................9
2.3 Composition ...............................................................................................................................10
2.4 Installation Requirement..........................................................................................................10
3. Operation .................................................................................................................... 11
3.1 Power On ....................................................................................................................................11
3.2 Set-up ..........................................................................................................................................12
3.3 Coating Thickness .....................................................................................................................13
4. Measurement ............................................................................................................. 14
4.1 Measurement of sample due to target.................................................................................14
4.2 Measurement of variety samples through Au coating ......................................................15
5. Maintenance ............................................................................................................... 16
5.1 Error List......................................................................................................................................16
5.2 Replacing Target ........................................................................................................................16
5.3 Cleaning of chamber ................................................................................................................17
