Coremorrow S54 Series Manual de usuario
S54 Piezo Tip/Tilt Stage
User Manual
Version: V1.0
This document describes the following products:
■S54.T2S
■S54.T2K
DECLARATION
This user manual is applicable to S54 piezo tip/tilt stage, for your smooth
and correct use of this product, please read this manual carefully before
using it. Please follow the instructions in the installation and use process.
Improper operation may cause injury to the operator and/or damage to the
product, so it is required that the entire installation and operation process
should be completed by professionals with a certain foundation and a
certain understanding of product principles, or under the guidance of a
professional.
If you disassemble or transform the product without permission, our
company will not be responsible for any consequences arising therefrom.
To change the product model and other false sales of our company's
products are illegal, users should be vigilant. Once found, you should
actively report or contact our company, jointly crack down on illegal acts,
and prevent fraud and economic losses. CoreMorrow will investigate for the
legal responsibility of the illegal subject and related party.
With the continuous development and innovation of technology,
CoreMorrow will timely add the latest information to the manual as
required. If you need, please contact us, or to our website www.coremorrow.
com for download, we apologize for any inconvenience caused to you.
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1. Introduction ........................................................................................................................................2
1.1 Purpose and content ................................................................................................................2
1.2 Symbol and meaning................................................................................................................2
1.3 Users of This Manual ................................................................................................................2
1.4 Manual Lost and Reissued......................................................................................................2
2. Safety Guide........................................................................................................................................3
3. Product Overview ...........................................................................................................................4
3.1 Product Introduction ................................................................................................................4
3.2 Product Features........................................................................................................................5
3.3 Motion direction ........................................................................................................................5
4. Operating environment ..................................................................................................................6
5. Installation and operation..............................................................................................................6
5.1 Installation and Precautions...................................................................................................6
5.2 Load................................................................................................................................................8
5.3 Operating...................................................................................................................................10
6. Transportation and inspection ..................................................................................................11
6.1 Transportation..........................................................................................................................11
6.2 Open-Box Inspection.............................................................................................................12
7. Maintenance and Treatment......................................................................................................12
7.1 Problem Handling...................................................................................................................12
7.2 Daily maintenance..................................................................................................................13
7.3 Disposal......................................................................................................................................14
8. Connector .........................................................................................................................................14
8.1 Driving and Sensor Connector...........................................................................................14
9.Customer Service ............................................................................................................................15
10.Contact us........................................................................................................................................16
Contents
S54 Piezo Tip/Tilt Stage User Manual
2
1.
2.
1. Introduction
1.1 Purpose and content
The manual is mainly for smooth and correct use of S54 piezo tip/tilt stage.
The manual contains all the necessary information for S54 piezo tip/tilt stage.
Introduction of the precautions during installation and use.
1.2 Symbol and meaning
DANGER: Improper handling may could cause injury to the operator.
Attention: Improper handling can cause damage to the equipment.
No order between items.
1.3 Users of This Manual
The default user of this manual has knowledge of piezoelectric products and controllers,
and has a certain basis for their installation and use.
1.4 Manual Lost and Reissued
If this manual is lost, please contact CoreMorrow. We will send you the latest version of the
user manual.
Please operating in order.
3
In order to prevent damage to the product caused by improper operation, the
following points should be paid attention to when in use.
S54 piezo tip/tilt stage is used in a dust-free, oil-free and lubricant-free environment.
As the product is designed with flexible structure, it is recommended that the load
should not exceed load capacity of product. When loading, DO NOT apply torque
force and DO NOT pry or twist the load surface, so as not to damage the structure.
Recommended voltage range is 0~120V for long-term use and lifetime.
Do not disassemble the product to avoid damage.
Avoid stretching and bending the cable interface to prevent damage to the cable.
Use the dedicated cable provided by CoreMorrow to connect S54 piezo tip/tilt stage
to controller.
Do not connect via an extension cable casually, if you need a longer cable, please contact
CoreMorrow.
A change in temperature and pressure will charge the piezoelectric actuator, and
the actuator will remain energized for a period of time when it is disconnected
from the controller, So the operator should pay attention to when in use:
Do not disassemble S54 piezo tip/tilt stage.
Discharge S54 before installation, which can be done by connecting to the
controller.
Do not unplug the wire connecting with controller during operation.
Before use, check whether the connection wire of the product is in good condition and
whether the product and the controller are effectively grounded. During operation,
strictly standardize the operation. Do not touch the product (up to 150V voltage) with
your hand when power on, in case of danger.
2. Safety Guide
S54 piezo tip/tilt stage is designed with the most advanced technology and safety
standards for your own safety and the correct use of the product, please observe the
following points when in use
S54 Piezo Tip/Tilt Stage User Manual
4
3. Product Overview
3.1 Product Introduction
S54 piezo tip/tilt stage has the following advantages:
High performance piezo stack:
S54 piezo tip/tilt stage is driven by a highly reliable ceramic actuator with a fully insulated
structure, so its performance and service life are far better than the traditional actuator.
The insulating layer can effectively prevent the piezoelectric ceramic from being damaged
when exposed to moisture. Therefore, the stability of piezoelectric ceramics can be
guaranteed under extreme circumstances. Compared with traditional driving mechanism,
there are no transmission parts and friction. Therefore, ceramic actuator has the
characteristics of no rebound, no maintenance, and no wear, etc.
Flexible hinge structure:
S54 piezo tip/tilt stage adopts flexible hinge mechanism has advantages of no friction,
high positioning accuracy. Flexible hinge is an element not affected by static and dynamic
friction, based on the elastic deformation of metal material (e.g., steel) , there is no rolling
and sliding parts. Flexible unit has very high load capacity and stiffness. Hinge guide needs
no maintenance and no wear and tear. Suitable for a wide range of temperatures, no
lubricating oil is required.
Strain Sensor：
Strain sensor detects the position information by its own expansion. They are fixed in the
proper position of the transmission part and measure the displacement of the moving
part. This type of position measurement is made by contact and indirect measurement. So
the displacement of the moving platform is measured by measuring lever, guide hinge, or
piezoelectric ceramic stack.
The sensor is connected by a full bridge, no drift, and can be precisely positioned in the
nanometer range.
The S54 can run up to ±1.1mrad, can do two dimensional tilt at the same time,. Adopting
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3.2 Product Features
High resolution.
Closed loop strain gauge sensor, high positioning accuracy.
Quick response.
3.3 Motion direction
flexible hinge makes θXθY motion uncoupled, and features fast response speed, high
repeatable positioning accuracy, high flexibility, easy to operate, so it can meet different
applications. This product can also be customized according to the needs.
S54 is mainly used in biotechnology, interferometry, quality detection, optical detection,
nanometer positioning, microscopy and imaging, image processing and other fields.
FIG. 1 S54 Motion Direction
AXIS2 AXIS1
Lead out
S54 Piezo Tip/Tilt Stage User Manual
6
4. Operating environment
A clean, dustfree and non-corrosive environment
Operating temperature : -20~80℃
Relative humidity : <60%
Recommended voltage range is 0~120V for long-term use and lifetime
The label and motion direction of S54 is as follows:
Table1.S54 Label and motion Direction
Model Motion direction Function Label
N50
AXIS1
PZT Drive CH1
Senser output 1
AXIS2
PZT Drive CH2
Senser output 2
Constant voltage PZT Drive CH3
5. Installation and operation
Safety check should be carried out before installation, such as whether the connection wire
is damaged or broken, whether the drive power supply is grounded, etc.
5.1 Installation and Precautions
1.Ensure that the installation plane is relatively flat;
2.Mount M3 on the mounting surface directly and tighten it;
3.Mounting the load and tighten it properly to ensure the positioning accuracy;
4.Connect the S54 connector with the corresponding controller according to the
identification at the connector;
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The wiring mode of LEMO connector is shown as below:
FIG.2 Connector diagram
Sensor output Label for sensor output
Label for PZT drive
PZT drive output
S54 Installation diagram is as follows:
FIG. 3 S54 installation diagram
Mounting hole (M3 screw)
Motion surface
Mounting hole (M6 screw)
S54 Piezo Tip/Tilt Stage User Manual
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5.2 Load
When mounting the load, ensure that the load quality is less than the maximum load
capacity of S54, and try to mount the load in the center of the moving surface.
The correct position to mount the load is shown below.
FIG.4 The load is applied to the center of the moving surface
For the protection of the product, we do not recommend that the load is too high. If a
high load must be used, please appropriately low the position of the center of gravity of
the load.
FIG.5 Try not to let the position of the center of gravity far exceed the active platform
The wrong mounting way is shown in the figure below:
Este manual sirve para los siguientes modelos
2
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