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1.5 Parallelism of the Lower and Upper Platen
The parallelism of the lower and upper platens should be checked quarterly or when an
issue in tool performance is noticed (vacuum loss, contaminated platen, etc.). For the
tool to be operational the lower platen must be parallel with the linear movement of the
X Axis slide and the upper platen must be parallel to the lower platen. The procedure to
check parallelism of lower and upper platens is as follows:
1. Navigate to Diagnostics – Debonder Diagnostics - Other Controls tab.
2. Wait for lift pins to lower and then move the lower platen to the press position by
pressing the Press Position button.
3. Move the lower platen up using the Z Axis controls until the lower platen is
almost touching the upper platen. The closer the platens, the more precise the
platen setup will be. The gap should be approximately 20-50 µm; enough to see
light through.
4. If the gap between the platens is not uniform from the ends of the tool, adjust the
two leveling screws on the far right of the upper platen.
a. To adjust, loosen the locking socket bolts with a 3/16-inch Allen wrench
and turn the leveling screw using the tool provided.
b. Turning the leveling screw clockwise will raise the corresponding side of
the upper platen and counter clockwise will lower it. Tighten locking socket
bolts when done.
c. If the gap is large, the lower platen may need to be lower or raised during
this step.
5. Once the gap from the side looks uniform, look at the gap from the front. If the
gap is not uniform, adjust the leveling screw on the left of the upper platen.
a. To adjust, loosen the locking socket bolt on the right with a 3/16-inch Allen
wrench and turn the leveling screw using the tool provided.
b. Turning the leveling screw clockwise will raise the corresponding side of
the upper platen and counter clockwise will lower it. Tighten locking socket
bolts when done.
c. If the gap is large, the lower platen may need to be lower or raised during
this step.
6. Once the gap is uniform from the side and the front, the parallelism of the platens
to the X Axis slide must be checked.
a. To do this, navigate to X Axis controls-Velocity Jog. Enter 200 mm into the
distance field and 5 mm/s into the velocity field.
b. Move the lower platen to the left and monitor the gap.
c. If the gap narrows, stop the platen and adjust the leveling screw on the
right of the lower platen counter clockwise. If the gap grows, the leveling
screw on the right of the lower platen must be turned clockwise. Tighten
locking socket bolts when done.
7. When an adjustment has been made to the lower platen, the upper platen will
need to be adjusted again. Move the lower platen back to the press position.
Repeat steps 5 and 6 until the gap no longer increases or decreases in step 6.
8. Once the platens are parallel, run the Vac Search Start Routine in the Setup tab.
