BOC Edwards EXT200/200/30 Manual de usuario

B756-00-880 Issue A Original

Instruction Manual

EXT200/200/30 Split Flow Compound Turbomolecular Pump

98/37/EC

89/336/EEC

73/023/EEC

Description Item Number

24 Volt EXT200/200/30 Compound Turbomolecular Pump B756-11-991

80 Volt EXT200/200/30 Compound Turbomolecular Pump B756-10-000

24 Volt EXT200/200/30 Cartridge Compound Turbomolecular Pump B756-15-991

80 Volt EXT200/200/30 Cartridge Compound Turbomolecular Pump B756-15-000

^%, BOC EDWARDS

Declaration

ofConformity

We, BOCEdwards,

ManorRoyal,

Crawley,

WestSussex,RH102LW,UK

declareunderoursoleresponsibilitythattheproduct(s)

8756-10-000

8756-1

-000

8756-11

-991

EXT200/200/30

80V

EXT200/200/3080V

EXr200120013024v

to whichthisdeclarationrelatesisin conformitywith the followingstandard(s)

or other normativedocument(s)

EN292

EN1

2-2

EN61010-1.

EN61326

(lmmunity,

ClassBEmissions)

SafetyofMachinery:Basic

Concepts,

GeneralPrinciples

for Design.

CompressorsandVacuumPumps

- SafetyRequirements

Part2.

SafetyRequirementsfor ElectricalEquipment

for Measurement

ControlandLaboratory

Use.

ElectricalEquipmentfor Measurement,Control

andLaboratoryUse

- EMCRequirements.

The

pumps

complywith

EN61010-1wheninstalledin

accordance

with

the

instructionmanualsupplied

with

the

pumps.

following

theprovisions

73l023|EEC

89i336iEEC

98137IEC

LowVoltageDirective.

Electromagnetic

Compatibility

Directive.

MachineryDirective,

it{usre?s3 CnAvrEY

Dr,

l. D. Watson,SeniorTechnicalManager Dateand

Place

VacuumEquipmentandExhaustManagementProductDivisions

This

product

has

been

manufactured

underaquality

system

registeredtolSO9001

ffi.ffi aoc HDwARas

^% BOC EDWARDS

Declaration

Incorporation

We, BOCEdwards,

ManorRoyal,

Crawley,

WestSussex,

RH10

ZLW,UK

declare

underour

soleresponsibility

thatthe

machine(s)

EXTCompound

Turbomolecular

Pumps:

8756-15-000 EXT200/200/30

cartridge

80V

8756-15-991 EXf2001200130

cartridge

24V

to whichthisdeclaration

relatesis

intended

to beincorporated

intootherequipment

and

notto function

independantly.

Themachine(s)

isinconformity

withthefollowing

standard(s)

or other

normative

document(s).

EN292 SafetyofMachinery:

Basic

Concepts,

General

Principles

for Design.

EN1012-2 Compressors

and

VacuumPumps

-Safety

Requirements

Part2.

EN61010-1. Safety

Requirements

forElectrical

Equipment

forMeasurement

Control

andLaboratoryUse.

EN61326 ElectricalEquipment

forMeasurement,

Control

(lmmunity, and

LaboratoryUse

- EMC

Requirements.

ClassB

Emissions)

The

pumps

comply

withEN61010-1

wheninstalled

accordance

withthe

instruction

manualsupplied

with

the

pumps.

Themachine(s)

must

notbe

put

intoservice,

untiltheequipment

into

whichit is

incorporated,

hasbeen

brought

Intoconformity

with

theprovisions

ofthe

MachinerySafety

Directive

98/37/EC,

ELTr.rrrQ,

2od3 qrAr.lr.t\/

Dr,L D, Watson,Senior

Technical

Manager

VacuumEquipment

and ExhaustManagement

ProductDivisions

This

product

hasbeen

manufacturedunder

a quality

system

registered

tolSO9001

EHs Dateand

Place

ffilf ffi*t HtrtYARps

Jun 03 Issue A

EXT200/200/30 Split Flow Compound Turbomolecular Pump

PAGE

1 INTRODUCTION 1

1.1 Scope and definitions 1

2TECHNICALDATA 3

2.1 General 3

2.2 Pumping media 3

2.3 Vent gas specification and vent control data 4

2.4 Materials exposed to gases pumped 6

3 INSTALLATION 9

3.1 Unpack and inspect 9

3.2 Typical installation 9

3.3 Connection to the vacuum system 9

3.3.1 Mechanical fixing 10

3.3.2 Inlet-screens (supplied fitted) 10

3.3.3 Inlet connection and orientation 11

3.3.4 Backing connection 12

3.4 Vent options, vent valve connection and control 12

3.5 Electrical installation 13

3.5.1 EXDC controllers 13

3.5.2 EXC controllers 13

3.6 Cooling 13

3.6.1 Introduction 13

3.6.2 Forced-air cooling 13

4OPERATION 15

4.1 Start-up 15

4.2 Shut-down 15

4.3 Safety interlocks and control system 15

4.3.1 EXDC controllers 15

4.3.2 EXC controllers 16

5 MAINTENANCE 17

5.1 Introduction 17

5.2 Bearing maintenance 17

5.3 Cleaning the pump 17

5.4 Fault finding 17

6 STORAGE AND DISPOSAL 21

6.1 Storage 21

6.2 Disposal 21

7 SERVICE, SPARES AND ACCESSORIES 23

CONTENTS

Section Title Page

dcs/0156/0203

Issue A Jun 03

EXT200/200/30 Split Flow Compound Turbomolecular Pump

PAGE

7.1 Introduction 23

7.2 Service 23

7.3 Spares 23

7.3.1 Inlet-screens 23

7.3.2 Inlet-flange seals 23

7.4 Accessories 24

7.4.1 Installation 24

7.4.2 EXDC drive modules 24

7.4.3 EXC controllers 24

7.4.4 Pump-to-controller cables 24

7.4.5 TAV vent-valve and vent-port adaptor 24

7.4.6 ACX air-cooler 24

7.4.7 VRX vent-restrictor 24

INDEX 27

RETURN OF BOC EDWARDS EQUIPMENT

ILLUSTRATIONS

Figure Title Page

1 Dimensions of the EXT200/200/30 split flow pump (units in mm) 7

2 Opening procedures for packaging 9

3 EXT200/200/30 split flow system 9

4 Correct installation of inlet-screen 10

5 Mounting attitude of the EXT200/200/30 split flow pump 11

6 Installation of optional accessories 26

CONTENTS (continued)

Section Title Page

Jun 03 Issue A

EXT200/200/30 Split Flow Compound Turbomolecular Pump

PAGE

iii

1 General data 3

2 Vent gas and vent control data 4

3 Technical data 4

4 List of items supplied 10

5 Vent-restrictor orifice diameter

(with atmospheric pressure at the inlet of the vent-valve) 12

6 Fault finding 18

7Spares 23

8 EXDC drive modules 24

9 EXC controllers 24

10 Pump-to-controller cable 25

11 TAV vent-valve and vent-port adaptor 25

12 ACX air-cooler 25

13 VRX vent-restrictor 25

ASSOCIATED PUBLICATIONS

Publication Title Publication Number

EXDC Turbomolecular Pump Drive Modules D396-40-880 Issue C

TABLES

Table Title Page

Issue A Jun 03

EXT200/200/30 Split Flow Compound Turbomolecular Pump

PAGE

This page intentionally blank.

Jun 03 Issue A

EXT200/200/30 Split Flow Compound Turbomolecular Pump

INTRODUCTION

PAGE

1INTRODUCTION

1.1 Scope and definitions

This manual provides installation, operation,

maintenance and storage instructions for the BOC

Edwards EXT200/200/30 Split Flow Compound

Molecular Pump. Covering both the 24 V and 80 V

variants. Please read and follow all instructions in

this manual.

The EXT200/200/30 Split Flow Compound

Molecular Pump is designed for use with a BOC

Edwards EXDC or EXC Controller. Read this

manual and the instruction manual supplied with

your controller before you attempt to install or

operate the equipment. The controller manual

contains details of electrical installation.

Important safety information in this manual is

highlighted as WARNING and CAUTION

instructions; please obey these instructions. The use

of WARNINGS and CAUTIONS is defined below.

In accordance with the recommendations of

EN61010, the following warning symbols may

appear on the pump or its accessories:

Warning - refer to accompanying

documentation.

Warning - risk of electric shock.

WARNING

Warnings are given where failure to

observe the instruction could result

in injury or death to people.

CAUTION

Cautions are given where failure to observe the

instruction could result in damage to the

equipment, associated equipment or process.

Warning - hot surfaces.

The units used throughout this manual conform to

the SI international system of units of measurement.

Also throughout this manual, wherever flow rates

are specified, the abbreviation 'sccm' is used to mean

standard cm3min-1: this is a flow of 1 cm3min-1 at an

ambient temperature of 0 oC and a pressure of

1013 mbar (1.013 x 105Pa).

Issue A Jun 03

EXT200/200/30 Split Flow Compound Turbomolecular Pump

PAGE

This page intentionally blank.

Este manual sirve para los siguientes modelos

Tabla de contenidos

Otros manuales de Bomba de agua de BOC Edwards

BOC Edwards

BOC Edwards Seiko Seiki STP603 Series Manual de usuario

BOC Edwards

BOC Edwards EXT250M/ISO100 Manual de usuario

BOC Edwards

BOC Edwards A343-15-904 Manual de usuario

BOC Edwards

BOC Edwards 18B4B Manual de usuario

BOC Edwards

BOC Edwards iL70 Manual de usuario

BOC Edwards

BOC Edwards E1M275S Manual de usuario

BOC Edwards

BOC Edwards 412-J Manual de usuario

BOC Edwards

BOC Edwards XDS Series Manual de usuario

BOC Edwards

BOC Edwards XDS35i Manual de usuario

BOC Edwards

BOC Edwards E2M28 Manual de usuario

BOC Edwards

BOC Edwards EO2K Manual de usuario

BOC Edwards

BOC Edwards E1M18 Manual de usuario

BOC Edwards

BOC Edwards ESDP12 Manual de usuario

BOC Edwards

BOC Edwards Seiko Seiki STP A803 Manual de usuario

BOC Edwards

BOC Edwards STP-A2203 Series Manual de usuario

BOC Edwards

BOC Edwards iH Series Manual de usuario

BOC Edwards

BOC Edwards E1M175S Manual de usuario

BOC Edwards

BOC Edwards Seiko Seiki STPH803C Manual de usuario

BOC Edwards

BOC Edwards EXT555H Manual de usuario

Manuales populares de Bomba de agua de otras marcas

Neptun

Neptun NPHW 5500 Manual de usuario

Sensidyne

Sensidyne Gilian BDX-II Instrucciones de instalación y funcionamiento

Draper

Draper 47808 Manual de usuario

Trolla

Trolla 12820 Manual de usuario

Sunfab

Sunfab SVH Series Manual de usuario

WilTec

WilTec 50740 Manual de usuario

Fieldmann

Fieldmann FVC 5015 EK Manual de usuario

Everbilt

Everbilt EFSUB5-122HD Manual de usuario

Graco

Graco Husky 3300e Manual de usuario

esotec

esotec 101018 Manual de usuario

moyno

moyno 2000 CC Manual de usuario

Becker

Becker BASIC VASF 2.80/1-0.AC230 Manual de usuario

Sykes AmeriPumps

Sykes AmeriPumps GP100M Guía de solución de problemas

DUROMAX

DUROMAX XP WX Series Manual de usuario

BRINKMANN PUMPS

BRINKMANN PUMPS SBF550 Manual de usuario

Franklin Electric

Franklin Electric IPS Manual de usuario

Xylem

Xylem e-1532 Series Manual de usuario

Milton Roy

Milton Roy PRIMEROYAL Manual de usuario