© Beneq 2020
-Vent the load lock from the load lock window.
-Open the load lock chamber lid.
-Load the substrate on the substrate carrier.
-Close the load lock chamber lid.
-Pump down the load lock chamber from the load lock window.
-Open the gate valve from the load lock window.
-Push the substrate carrier into the reaction chamber until it is in the front position.
-Lift substrate up by pressing the substrate lifter button. The button is lit when active.
-Pull back substrate carrier to home position.
-Lower substrate by pressing the substrate lifter button. The indication light of the
button goes off.
-Close the reaction chamber for the process by pressing the substrate holder button.
The button is lit when active.
-Close gate valve from the load lock window.
Unloading the substrate through the load lock
-Open the reaction chamber after the process by pressing the substrate holder button.
The indication light of the button goes off.
-Check the loadlock is in vacuum condition.
-Open gate valve from the load lock window.
-Lift substrate up by pressing the substrate lifter button. The button is lit when active.
-Push the substrate carrier into the reaction chamber until it is in front position
-Lower substrate to the carrier by pressing the substrate lifter button. The indication
light of the button goes off.
-Pull back substrate carrier to home position.
-Close gate valve from the load lock window.
-Vent the load lock from the load lock window.
-Open the load lock chamber lid.
-Unload the substrate.
Processing/Run recipe:
-Select and load the right recipe.
-Start the run (by pressing the "Start batch" button in the control window).
-Check that the temperature set values are right.
-Check that the pressure values are at the right level. To avoid precursor leaking from
the reaction chamber to the vacuum chamber, the pressure of vacuum chamber should
always be higher than the reaction chamber.
-Follow the instructions given by pop-up windows which are defined in the recipe, i.e.
the substrate and precursor temperatures reach to setting points, hand valves of
precursor containers are opened and etc.
1.4 Precursor delivery
RISK OF INJURY DUE TO HIGH PRESSURE FLUIDS AND GASES IN THE
PRECURSOR LINES! SAFETY GOGGLES IS RECOMMENED DURING THE
OPERATION.
In general, the precursor delivery can be described in several different ways, while the
three most common ways are the following:
