BeamTec Magnetron MPS 500 Manual de usuario
BeamTec GmbH
Wolfgang-Paul-Str. 4, 89081 Ulm, Germany
http: www.beamtec.de , e-mail: info@beamtec.de tel.: +49 731 146620-0
Magnetron Power Supply MPS 500
User Manual
August 2016, Rev2.1
EXCECUTIVE SUMMARY
The document contains a detailed description of the
start-up, configuration & interfacing of the power supply
MPS 500 User Manual Rev.2.1
BeamTec GmbH
Wolfgang-Paul-Str. 4, 89081 Ulm, Germany
http: www.beamtec.de , e-mail: info@beamtec.de tel.: +49 731 146620-0
3
Table of content
1.Introduction 5
1.1. Intended Use 5
1.2. Liabilities and Warranty 5
1.4 Safety 6
1.4.1. Personnel Qualifications 6
1.4.2. Illustration Of Residual Dangers 6
1.4.3. General Safety Instructions 7
2. technical Data 9
2.1. General Data 9
2.1.1. Mechanical Data 9
2.1.2. ambience 10
2.1.3. Use and Operating Modes 10
2.1.4. STANDARDS 11
2.2. Mains Connection 11
2.3. Specifications 11
2.4 Features: 12
2.5. Interfaces 13
2.5.1. I/O interface 13
2.5.2. UART I ( RS232/RS485 ) 13
2.5.3 UART II BLUETOOTH 13
2.5.4 ETHERNET/IP 13
3. Installation 14
3.1. Unpacking 14
3.2. Mechanical Installation 14
3.2.1. Bench Top Unit 15
3.2.2. Rack Installation 15
3.3. Connecting 17
3.3.1. Rear Panel 17
3.3.3. Grounding 19
3.3.4. High Voltage Connectors HV1 and HV2 19
3.3.5. Interface Connector I/O 21
3.3.6. Vacuum Gauge Connector –„Gauge” 24
3.3.7 RS232/482 Interface Connector 25
3.3.8 Ethernet Interface 26
4. Using the Power Supply MPS500 28
4.1. Front Panel 28
4.1.1. Main Power Switch 28
4.1.2. Membrane Keyboard 29
4.1.3. High Voltage Indicator 30
4.1.4. Alphanumeric LCD display 30
4.1.5. Power Bar Identifier 30
4.1.6. Rotary Encoder with Press Button 31
4.2. Menu 31
4.2.1. Main Menu 32
4.2.3. Constant Power Mode Set 33
4.2.4. Constant Voltage Mode Set 33
4.2.5. Constant Current Mode Set 34
4.3. Submenus ( Main Menu ) 35
4.3.0. HV1 and HV2 output configuration 35
MPS 500 –User Manual Rev. 2.1
BeamTec GmbH
Wolfgang-Paul-Str. 4, 89081 Ulm, Germany
http: www.beamtec.de , e-mail: info@beamtec.de tel.: +49 731 146620-0
4
4.3.1. Limits Settings 36
4.3.2. Ramp Settings 36
4.3.3. PI parameters for Constant Power Operation 37
4.3.4. Arcs Settings 37
4.3.5. Timer Or Continue Operating mode 39
4.3.6. Display Operating Mode Set –Timer, Vacuum or Arcs number 40
4.3.7. Load And Safe Options 41
4.3.7.1 LOAD the program 41
4.3.7.2 SAVE the program 42
4.3.8. SETTINGS options 42
4.3.9. SERVICE options 43
4.3.10. INFORMATION menu 43
4.4.0. COMMUNICATION options 44
4.4.0.1 INTERFACE Options 44
4.4.0.2 PARAMETERS Options 44
4.4.0.3 UNIT ADDRESS Option 45
4.4.0.4 SOFTWARE REMOTE Option 46
4.4.1 DISPLAY PARAMETERS Option 46
4.4.2 INTERLOCK TYPE option 47
4.4.3 BEEPER option 48
4.4.4 PRESSURE CHANNEL option 48
4.4.5. SAFE SETTINGS options 52
5. Additional Information 54
5.1 No Interlocks connected 54
5.2 Interlock lost during the normal operation 54
5.3 Overtemperature 55
6.Maintenance and Service 56
6.1 Maintenance 56
6.1.1 Cleaning 57
7 Storage and Disposal 58
7.1 Packaging 58
7.2 Storage 58
7.3 Disposal 58
8. Addition 59
8.1. Troubleshooting 59
9.Warranty Conditions 60
MPS 500 User Manual Rev.2.1
BeamTec GmbH
Wolfgang-Paul-Str. 4, 89081 Ulm, Germany
http: www.beamtec.de , e-mail: info@beamtec.de tel.: +49 731 146620-0
5
1.INTRODUCTION
Please read this manual carefully to ensure optimum operating conditions right from the
start. This user manual handbook contains important information about the functionality,
installation, start-up and operation of the Magnetron Power Supply MPS500.
1.1. INTENDED USE
Power Supply MPS500 is a high voltage device which generates a high DC voltage of negative
polarity. MPS500 can be operated in three modes: Constant Power, Constant Voltage or
Constant Current.
The main field of application is the formation of plasma processes. The concept and design of
the power supply allows for safe and reliable integration of complex process control systems.
The device is referred to as MPS500 in the remainder of this manual.
1.2. LIABILITIES AND WARRANTY
BeamTec BeamTec company is not liable for damages resulting from improper use of the
device and the guarantee expires, if the user, or third party:
- ignores information contained in this manual,
- utilizes the product in a manner inconsistent with intended purpose,
- makes any modification or alteration of the product,
- unit should not be used with unauthorized accessories (compatible accessories, types
and models can be found in the product documentation)
BeamTec company reserves the right to make changes without prior notice. Illustrations may
vary depending on the version of the device.
MPS 500 –User Manual Rev. 2.1
BeamTec GmbH
Wolfgang-Paul-Str. 4, 89081 Ulm, Germany
http: www.beamtec.de , e-mail: info@beamtec.de tel.: +49 731 146620-0
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1.4SAFETY
1.4.1. PERSONNEL QUALIFICATIONS
All work described in this document may only be carried out by persons who have
suitable technical training and the necessary experience or who have been instructed by the
end user of the product.
1.4.2. ILLUSTRATION OF RESIDUAL DANGERS
This Operating Manual illustrates safety notes concerning residual dangers as follows:
Information on preventing any kind of physical injury.
Information on preventing extensive equipment and environmental damage.
Information on correct handling or use. Disregarding safety notes can lead to malfunctions or
equipment damage.
Note: Indicates particularly important, but not safety-relevant information.
DANGER
!
WARNING
!
CAUTION
!
MPS-10 Instrukcja obsługi Rev.1.0
BeamTec GmbH
Wolfgang-Paul-Str. 4, 89081 Ulm, Germany
http: www.beamtec.de , e-mail: info@beamtec.de tel.: +49 731 146620-0
1.4.3. GENERAL SAFETY INSTRUCTIONS
For all work you are going to do, adhere to the applicable safety regulations. Also
observe all safety notes given in this document and forward the information to all other users
of the product. In particular, pay attention to the following safety notes:
Fig 1.0.1 Do not insert objects through louvers and keep device dry
Mains voltage.
Contact with live parts is extremely hazardous when any objects are
introduced or any liquids penetrate into the device.
Make sure that no objects enter through the louvers of the device. Keep the
device dry.
DANGER
!
MPS 500 –User Manual Rev. 2.1
BeamTec GmbH
Wolfgang-Paul-Str. 4, 89081 Ulm, Germany
http: www.beamtec.de , e-mail: info@beamtec.de tel.: +49 731 146620-0
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Improper use.
Improper use can damage the MPS500.
Use the MPS500 only as intended by the manufacturer.
Improper installation and operation data.
Improper installation and operation data may damage the MPS500.
Strictly adhere to the stipulated installation and operation data.
WARNING
!
WARNING
!
MPS 500 User Manual Rev.2.1
BeamTec GmbH
Wolfgang-Paul-Str. 4, 89081 Ulm, Germany
http: www.beamtec.de , e-mail: info@beamtec.de tel.: +49 731 146620-0
9
2. TECHNICAL DATA
2.1. GENERAL DATA
2.1.1. MECHANICAL DATA
Dimensions: Width: 482 mm
Height: 88,1 mm (2 HU)
Depth: 340 mm
See Fig . 2.1.1
Net Weight: 3,3 kg
Installation: 19” Rack standard or Bench Top unit
Fig. 2.1.1 Dimensions (mm)
Note: The image above is illustrative, rear panel connectors may differ depending on
the version of the device.
483 mm
87 mm
418 mm
310 mm
270 mm
MPS 500 –User Manual Rev. 2.1
BeamTec GmbH
Wolfgang-Paul-Str. 4, 89081 Ulm, Germany
http: www.beamtec.de , e-mail: info@beamtec.de tel.: +49 731 146620-0
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2.1.2. AMBIENCE
Temperature Storage: -10…+60 °C
Operation Temperature: +5…+40 °C
Relative Humidity: Max. 80 % (up to 31 °C), decreasing to max. 50
% (above 40 °C)
Use indoor only
Altitude: max. 2000 m n.p.m.
The degree of dust standard: II
Humidity resistance: IP20
2.1.3. USE AND OPERATING MODES
There are three common operation modes:
- manual control, with 5 buttons user interface on the front panel
- software remote control, with RS232/RS485 or Ethernet Interface
( All Read commands are accessible all the time, Write commands are
accessible only with activation of this function from the user menu –see
remote control for use )
- hardware remote control with I/O interface –see Fig.3.3.1
This mode is active with external signal only. In this mode all of the front
buttons are deactivated.
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