Agilent Technologies TwisTorr 305-ICQ Manual de usuario

Agilent TwisTorr 305-ICQ & 305-IC SF

User Manual

2 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual

Notices

Manual Part Number

D0007035

Edition A.00, December 2020

No part of this manual may be

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Agilent Technologies Italia S.p.A.

Vacuum Products Division

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Manufactured by Agilent Technologies

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Via F.lli Varian, 54, 10040 Leinì (TO),

ITALY

Printed in Italy

Operating Temperature

Operating Temperature: 5°C ÷35°C

Storage Temperature: -40°C ÷70°C

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Safety Notices

A CAUTION notice denotes a hazard. It

calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in damage to the product

or loss of important data. Do not

proceed beyond a CAUTION notice

until the indicated conditions are fully

understood and met.

A WARNING notice denotes a hazard.

It calls attention to an operating

procedure, practice, or the like that, if

not correctly performed or adhered to,

could result in personal injury or death.

Do not proceed beyond a WARNING

notice until the indicated conditions

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WARNING

CAUTION

Contents

Agilent TwisTorr 305-ICQ & 305-IC SF User Manual 3

Contents

1Istruzioni per l’uso 13

Informazioni su questo manuale 14

Validità 14

Definizioni e terminologia 15

Definizione di Attenzione, Avvertenza e Nota 15

Simboli di avvertenza 16

Sicurezza 18

Uso corretto 18

Uso improprio 19

Attrezzatura di protezione 20

Linee guida di sicurezza per pompe turbomolecolari 21

Trasporto & Immagazzinamento 22

Descrizione del prodotto 23

Installazione 24

Preparazione per l’installazione 24

Apertura 26

Fissaggio della TwisTorr 305-ICQ & 305-IC SF 27

Collegamento della flangia per alto vuoto 28

Installazione della flangia ISO-K 29

Installazione della flangia ConFlat 30

Collegamento della pompa di pre-vuoto 31

Avvio e funzionamento della TwisTorr 305-ICQ & 305-IC SF 32

Arresto della TwisTorr 305-ICQ & 305-IC SF 35

Arresto di emergenza 35

Contents

4 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual

Manutenzione 36

Vita del rotore 36

Soft Start 37

Pulizia 37

Smaltimento 38

Servizio Post Vendita 39

2Betriebsanleitung 40

Informationen über diese Betriebsanleitung 41

Gültigkeit 41

Definitionen und Terminologie 42

Definition von Vorsicht, Warnung und Hinweis 42

Warnsymbole 43

Sicherheit 45

Sachgemäße Verwendung 45

Unsachgemäße Anwendung 46

Schutzausrüstung 47

Sicherheitsrichtlinie für Turbomolekularpumpen 48

Transport und Lagerung 49

Produktbeschreibung 50

Installation 51

Vorbereitung zum Einbau 51

Einrichten 53

Montage von TwisTorr 305-ICQ & 305-IC SF 54

Anschluss des Hochvakuumflansches 55

Installation des ISO-K-Flansches 56

Installation des ConFlat-Flansches 57

Contents

Agilent TwisTorr 305-ICQ & 305-IC SF User Manual 5

Anschluss der Vorvakuumpumpe 58

Inbetriebnahme und Betrieb des TwisTorr 305-ICQ & 305-IC SF 59

Stoppen des TwisTorr 305-ICQ & 305-IC SF 62

Notausschaltung 62

Wartung 63

Rotordauer 63

Sanftanlauf 64

Reinigung 64

Entsorgung 65

Service 66

3Mode d’emploi 67

À propos de ce manuel 68

Validité 68

Définitions et terminologie 69

Signification des messages d’attention, d’avertissement et des notes 69

Symboles d'avertissement 70

Sécurité 72

Utilisation appropriée 72

Utilisation inappropriée 73

Équipements de protection individuelle 74

Directive de sécurité pour les pompes turbomoléculaire 75

Transport et entreposage 76

Description du produit 77

Installation 78

Préparation pour l’installation 78

Configuration 80

Contents

6 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual

Montage de la TwisTorr 305-ICQ & 305-IC SF 81

Raccordement de la bride à vide élevé 82

Installation de la bride ISO-K 83

Installation de la bride ConFlat 84

Raccordement de la bride à vide préliminaire 85

Démarrage et utilisation de la TwisTorr 305-ICQ & 305-IC SF 86

Arrêt de la TwisTorr 305-ICQ & 305-IC SF 89

Arrêt d’urgence 89

Entretien 90

Durée de vie du rotor 90

Démarrage progressif 91

Nettoyage 91

Élimination 92

Service 93

4Instrucciones de uso 94

Acerca del manual 95

Validez 95

Definiciones y terminología 96

Definición de Precaución, Advertencia y Nota 96

Símbolos de advertencia 97

Seguridad 99

Uso correcto 99

Uso incorrecto 100

Equipo de protección 101

Pautas de seguridad para bombas turbomoleculares 102

Transporte y almacenamiento 103

Contents

Agilent TwisTorr 305-ICQ & 305-IC SF User Manual 7

Descripción del producto 104

Instalación 105

Preparación para instalación 105

Puesta en marcha 107

Montaje de la TwisTorr 305-ICQ & 305-IC SF 108

Conexión de la brida de alto vaciado 109

Instalación de la brida ISO-K 110

Instalación de la brida ConFlat 111

Conexión de la bomba pre-vaciado 112

Puesta en marcha y funcionamiento de la TwisTorr 305-ICQ & 305-IC SF

113

Parada de la TwisTorr 305-ICQ & 305-IC SF 116

Parada de emergencia 116

Mantenimiento 117

Vida del rotor 117

Arranque suave (“Soft Start”) 118

Limpieza 118

Eliminación 119

Servicio 120

5使用说明121

关于本手册 122

有效性 122

定义与术语 123

小心、警告和注意的定义123

警告符号 124

Contents

8 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual

安全 126

正确使用 126

使用不当 127

防护设备 128

涡轮分子泵安全指南 129

运输及存储130

产品描述 131

安装 132

安装准备132

设置134

TwisTorr 305-ICQ & 305-IC SF 的安装 135

高真空法兰的连接136

ISO-K 法兰的安装 137

ConFlat 法兰的安装 138

前真空泵的连接139

TwisTorr 305-ICQ & 305-IC SF 的启动和运行 140

停止 TwisTorr 305-ICQ & 305-IC SF 143

紧急停止 143

维护 144

转子寿命 144

慢启动145

清洗 145

Contents

Agilent TwisTorr 305-ICQ & 305-IC SF User Manual 9

处置146

服务147

6取扱説明書 148

この説明書について 149

有効期 149

定義と用語 150

警告・注意・注の定義 150

警告の記号 151

安全性 153

適切な使用 153

不適切な使用 154

保護用装備 155

ターボ分子ポンプ用安全ガイドライン 156

移送＆保管 157

製品説明 158

取り付け 159

取り付けの準備 159

セットアップ 161

TwisTorr 305-ICQ & 305-IC SF 実装 162

高真空フランジの接続 163

ISO-K フランジの取り付け 164

ConFlat フランジの取り付け 165

フォア真空ポンプの接続 166

TwisTorr 305-ICQ & 305-IC SF の起動開始と操作 167

Contents

10 Agilent TwisTorr 305-ICQ & 305-IC SF User Manual

TwisTorr 305-ICQ & 305-IC SF を停止する 170

緊急停止 170

メンテナンス 171

ローターの寿命 171

ソフトスタート 172

クリーニング 172

処分 173

サービス 174

7Instructions for Use 175

About this manual 176

Validity 176

Definitions and terminology 177

Definition of Caution, Warning and Note 177

Warning Symbols 178

Safety 180

Proper use 180

Improper use 181

Protective equipment 182

Safety guideline for Turbomolecular Pumps 183

Transport & Storage 184

Product description 185

Installation 186

Preparation for installation 186

Set-up 188

TwisTorr 305-ICQ & 305-IC SF Mounting 189

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